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- W2109982116 abstract "Recent microfabrication technologies based on the LIGA (German acronym for Lithographe, Galvanoformung, und Abformung) process have been applied to build high-aspect-ratio, metallic or dielectric planar structures suitable for high-frequency rf cavity structures. The cavity structures would be used as parts of linear accelerators, microwave undulators, and mm-wave amplifiers. The microfabrication process includes manufacture of precision X-ray masks, exposure of positive resist by X-rays through the mask, resist development, and electroforming of the final microstructure. Prototypes of a 32-cell, 108-GHz constant-impedance cavity and a 66-cell, 94-GHz constant-gradient cavity were fabricated with the synchrotron radiation sources at APS and NSLS. This paper presents an overview of the new technology and details of the mm-wave cavity fabrication." @default.
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- W2109982116 date "2002-11-23" @default.
- W2109982116 modified "2023-09-22" @default.
- W2109982116 title "LIGA fabrication of mm-wave accelerating cavity structures at the Advanced Photon Source (APS)" @default.
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- W2109982116 doi "https://doi.org/10.1109/pac.1997.749687" @default.
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