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- W2110192129 abstract "We have developed a self-consistent fluid model that couples plasma dynamics, Navier-Stokes equations, and Maxwell's equations to analyze inductively coupled plasma reactors used in semiconductor processing. Two dimensional simulations of an N/sub 2/ plasma have been performed and found to agree well with experimental data. Images of plasma density, gas and ion traces are provided." @default.
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- W2110192129 date "1999-01-01" @default.
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- W2110192129 title "A self-consistent fluid simulation of an inductively coupled plasma reactor" @default.
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- W2110192129 doi "https://doi.org/10.1109/27.763031" @default.
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