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• W2110212728 abstract "The paper describes the design and fabrication of micro-electro-mechanical systems (MEMS) variable optical attenuator (VOA) made by a compliant organic thin film. The optical attenuation is achieved by changing the radius of curvature of the organic thin film actuated by the electrostatic force. The simulation results show that the attenuation range can achieve 20 dB at the wavelength of 1550 nm" @default.
• W2110212728 created "2016-06-24" @default.
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• W2110212728 date "2006-10-11" @default.
• W2110212728 modified "2023-09-26" @default.
• W2110212728 title "Organic variable optical attenuator made by compliant fluoropolymer membrane" @default.
• W2110212728 cites W1965154106 @default.
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• W2110212728 doi "https://doi.org/10.1109/omems.2005.1540071" @default.
• W2110212728 hasPublicationYear "2006" @default.
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