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• W2110235575 endingPage "2737" @default.
• W2110235575 startingPage "2732" @default.
• W2110235575 abstract "This paper presents a micro positioning mechanism with dual servo system. In the fields of micro positioning, micromanipulation and micro test instrument, the required motion precision is continuously increasing. Dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method." @default.
• W2110235575 created "2016-06-24" @default.
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• W2110235575 date "2003-01-01" @default.
• W2110235575 modified "2023-09-26" @default.
• W2110235575 title "Designing compensator of dual servo system for high precision position control" @default.
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