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- W2110260197 abstract "This paper addresses the practical realization of a complex hierarchical control system, which is able to maintain controllability and observability conditions in a fault tolerant manner for a variety of ion implanters as well as other related systems." @default.
- W2110260197 created "2016-06-24" @default.
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- W2110260197 date "2003-07-10" @default.
- W2110260197 modified "2023-09-27" @default.
- W2110260197 title "Achieving next generation performance of ion implanters with the Varian Control System (VCS)" @default.
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- W2110260197 doi "https://doi.org/10.1109/iit.2000.924177" @default.
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