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- W2110666943 abstract "Preferentially oriented and epitaxial Al films have been deposited by ionized cluster beams (ICB). The thermal stability of these films has been examined by SEM, AES, ion backscattering, and electrical characterization. In preferentially oriented films, long electromigration lifetime and low-temperature contact formation are expected. In epitaxial films on silicon, alloy penetration at the interface, a shift in barrier height, and degradation of crystalline quality were not observed after heat treatment up to 550 °C. Extremely long electromigration lifetime was also confirmed. Epitaxial growth Of Al film on CaF <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> , GaAs, and sapphire was attempted and preliminary results are given." @default.
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- W2110666943 date "1987-05-01" @default.
- W2110666943 modified "2023-10-16" @default.
- W2110666943 title "Metallization by ionized cluster beam deposition" @default.
- W2110666943 doi "https://doi.org/10.1109/t-ed.1987.23038" @default.
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