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- W2110942033 abstract "We consider control system synthesis for temperature control of a wafer in the semiconductor manufacturing system by using model reference inverse linear quadratic (abbreviated as MR-ILQ) control, which was proposed by the third and fourth authors [S. Kunimatsu and T. Fujii, 2003], as one of its significant applications in the industry process. First, we apply the subspace method [P.V. Overschee and B.D. Moor, 1994], [M. Verhaegen, 1994] to obtain a mathematical model described by multi-input multi-output state space representations for temperature dynamics of the wafer. Second, we design a robust servo system for tracking a step reference input without steady state error based on the MR-ILQ design method. Since this method yields not only robust steady state tracking but also robust transient tracking, it is possible to design a temperature control system with higher robust performance. Third, we show the efficiency of the above control system synthesis by experiment." @default.
- W2110942033 created "2016-06-24" @default.
- W2110942033 creator A5000750550 @default.
- W2110942033 creator A5017362841 @default.
- W2110942033 creator A5018205585 @default.
- W2110942033 creator A5039597924 @default.
- W2110942033 date "2005-03-07" @default.
- W2110942033 modified "2023-09-25" @default.
- W2110942033 title "Temperature control of wafer in semiconductor manufacturing systems by MR-ILQ design method" @default.
- W2110942033 cites W1977880420 @default.
- W2110942033 cites W2043260411 @default.
- W2110942033 cites W2112622471 @default.
- W2110942033 cites W2130212796 @default.
- W2110942033 cites W2149087996 @default.
- W2110942033 cites W2159890292 @default.
- W2110942033 cites W2329399876 @default.
- W2110942033 cites W2616005865 @default.
- W2110942033 cites W2634322473 @default.
- W2110942033 cites W2804647239 @default.
- W2110942033 doi "https://doi.org/10.1109/cca.2004.1387572" @default.
- W2110942033 hasPublicationYear "2005" @default.
- W2110942033 type Work @default.
- W2110942033 sameAs 2110942033 @default.
- W2110942033 citedByCount "0" @default.
- W2110942033 crossrefType "proceedings-article" @default.
- W2110942033 hasAuthorship W2110942033A5000750550 @default.
- W2110942033 hasAuthorship W2110942033A5017362841 @default.
- W2110942033 hasAuthorship W2110942033A5018205585 @default.
- W2110942033 hasAuthorship W2110942033A5039597924 @default.
- W2110942033 hasConcept C111919701 @default.
- W2110942033 hasConcept C119599485 @default.
- W2110942033 hasConcept C127413603 @default.
- W2110942033 hasConcept C133731056 @default.
- W2110942033 hasConcept C154945302 @default.
- W2110942033 hasConcept C155386361 @default.
- W2110942033 hasConcept C15744967 @default.
- W2110942033 hasConcept C160671074 @default.
- W2110942033 hasConcept C17500928 @default.
- W2110942033 hasConcept C183356978 @default.
- W2110942033 hasConcept C19417346 @default.
- W2110942033 hasConcept C2775924081 @default.
- W2110942033 hasConcept C2775936607 @default.
- W2110942033 hasConcept C2780799671 @default.
- W2110942033 hasConcept C31531917 @default.
- W2110942033 hasConcept C32834561 @default.
- W2110942033 hasConcept C41008148 @default.
- W2110942033 hasConcept C47446073 @default.
- W2110942033 hasConcept C536315585 @default.
- W2110942033 hasConcept C66018809 @default.
- W2110942033 hasConcept C98045186 @default.
- W2110942033 hasConceptScore W2110942033C111919701 @default.
- W2110942033 hasConceptScore W2110942033C119599485 @default.
- W2110942033 hasConceptScore W2110942033C127413603 @default.
- W2110942033 hasConceptScore W2110942033C133731056 @default.
- W2110942033 hasConceptScore W2110942033C154945302 @default.
- W2110942033 hasConceptScore W2110942033C155386361 @default.
- W2110942033 hasConceptScore W2110942033C15744967 @default.
- W2110942033 hasConceptScore W2110942033C160671074 @default.
- W2110942033 hasConceptScore W2110942033C17500928 @default.
- W2110942033 hasConceptScore W2110942033C183356978 @default.
- W2110942033 hasConceptScore W2110942033C19417346 @default.
- W2110942033 hasConceptScore W2110942033C2775924081 @default.
- W2110942033 hasConceptScore W2110942033C2775936607 @default.
- W2110942033 hasConceptScore W2110942033C2780799671 @default.
- W2110942033 hasConceptScore W2110942033C31531917 @default.
- W2110942033 hasConceptScore W2110942033C32834561 @default.
- W2110942033 hasConceptScore W2110942033C41008148 @default.
- W2110942033 hasConceptScore W2110942033C47446073 @default.
- W2110942033 hasConceptScore W2110942033C536315585 @default.
- W2110942033 hasConceptScore W2110942033C66018809 @default.
- W2110942033 hasConceptScore W2110942033C98045186 @default.
- W2110942033 hasLocation W21109420331 @default.
- W2110942033 hasOpenAccess W2110942033 @default.
- W2110942033 hasPrimaryLocation W21109420331 @default.
- W2110942033 hasRelatedWork W161244068 @default.
- W2110942033 hasRelatedWork W2185690376 @default.
- W2110942033 hasRelatedWork W2326651419 @default.
- W2110942033 hasRelatedWork W2359225346 @default.
- W2110942033 hasRelatedWork W2470072824 @default.
- W2110942033 hasRelatedWork W2995529902 @default.
- W2110942033 hasRelatedWork W3128991852 @default.
- W2110942033 hasRelatedWork W3200281295 @default.
- W2110942033 hasRelatedWork W4231867236 @default.
- W2110942033 hasRelatedWork W811374537 @default.
- W2110942033 isParatext "false" @default.
- W2110942033 isRetracted "false" @default.
- W2110942033 magId "2110942033" @default.
- W2110942033 workType "article" @default.