Matches in SemOpenAlex for { <https://semopenalex.org/work/W2111497030> ?p ?o ?g. }
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- W2111497030 endingPage "343" @default.
- W2111497030 startingPage "339" @default.
- W2111497030 abstract "The contamination of Si-implantation in GaAs was analysed with SIMS. This was done by measuring the molecules composed of the ‘contamination-atoms’ and the matrix atoms. It was concluded that there exists a co-implantation of 14N15, 10B19F, 11B18O up to 40% of the dose for the 29Si-implantation in the worst case and 20% of 14N2 for the 28Si-implantation. Electrical measurements and a residual gas analysis confirmed these results. A good mass separation for the implanter was found." @default.
- W2111497030 created "2016-06-24" @default.
- W2111497030 creator A5049003157 @default.
- W2111497030 creator A5057427132 @default.
- W2111497030 creator A5089857324 @default.
- W2111497030 date "1988-07-01" @default.
- W2111497030 modified "2023-09-30" @default.
- W2111497030 title "Investigation of cross-contamination during Si-implantion in GaAs with SIMS" @default.
- W2111497030 cites W2063251791 @default.
- W2111497030 doi "https://doi.org/10.1002/sia.740120604" @default.
- W2111497030 hasPublicationYear "1988" @default.
- W2111497030 type Work @default.
- W2111497030 sameAs 2111497030 @default.
- W2111497030 citedByCount "3" @default.
- W2111497030 crossrefType "journal-article" @default.
- W2111497030 hasAuthorship W2111497030A5049003157 @default.
- W2111497030 hasAuthorship W2111497030A5057427132 @default.
- W2111497030 hasAuthorship W2111497030A5089857324 @default.
- W2111497030 hasConcept C106487976 @default.
- W2111497030 hasConcept C107872376 @default.
- W2111497030 hasConcept C112570922 @default.
- W2111497030 hasConcept C113196181 @default.
- W2111497030 hasConcept C11413529 @default.
- W2111497030 hasConcept C145148216 @default.
- W2111497030 hasConcept C155512373 @default.
- W2111497030 hasConcept C159985019 @default.
- W2111497030 hasConcept C162356407 @default.
- W2111497030 hasConcept C177322064 @default.
- W2111497030 hasConcept C178790620 @default.
- W2111497030 hasConcept C185592680 @default.
- W2111497030 hasConcept C18903297 @default.
- W2111497030 hasConcept C192562407 @default.
- W2111497030 hasConcept C41008148 @default.
- W2111497030 hasConcept C41823505 @default.
- W2111497030 hasConcept C43617362 @default.
- W2111497030 hasConcept C49040817 @default.
- W2111497030 hasConcept C544956773 @default.
- W2111497030 hasConcept C57540601 @default.
- W2111497030 hasConcept C86803240 @default.
- W2111497030 hasConceptScore W2111497030C106487976 @default.
- W2111497030 hasConceptScore W2111497030C107872376 @default.
- W2111497030 hasConceptScore W2111497030C112570922 @default.
- W2111497030 hasConceptScore W2111497030C113196181 @default.
- W2111497030 hasConceptScore W2111497030C11413529 @default.
- W2111497030 hasConceptScore W2111497030C145148216 @default.
- W2111497030 hasConceptScore W2111497030C155512373 @default.
- W2111497030 hasConceptScore W2111497030C159985019 @default.
- W2111497030 hasConceptScore W2111497030C162356407 @default.
- W2111497030 hasConceptScore W2111497030C177322064 @default.
- W2111497030 hasConceptScore W2111497030C178790620 @default.
- W2111497030 hasConceptScore W2111497030C185592680 @default.
- W2111497030 hasConceptScore W2111497030C18903297 @default.
- W2111497030 hasConceptScore W2111497030C192562407 @default.
- W2111497030 hasConceptScore W2111497030C41008148 @default.
- W2111497030 hasConceptScore W2111497030C41823505 @default.
- W2111497030 hasConceptScore W2111497030C43617362 @default.
- W2111497030 hasConceptScore W2111497030C49040817 @default.
- W2111497030 hasConceptScore W2111497030C544956773 @default.
- W2111497030 hasConceptScore W2111497030C57540601 @default.
- W2111497030 hasConceptScore W2111497030C86803240 @default.
- W2111497030 hasIssue "6" @default.
- W2111497030 hasLocation W21114970301 @default.
- W2111497030 hasOpenAccess W2111497030 @default.
- W2111497030 hasPrimaryLocation W21114970301 @default.
- W2111497030 hasRelatedWork W1647179403 @default.
- W2111497030 hasRelatedWork W2042925312 @default.
- W2111497030 hasRelatedWork W2080404441 @default.
- W2111497030 hasRelatedWork W2111497030 @default.
- W2111497030 hasRelatedWork W2312552982 @default.
- W2111497030 hasRelatedWork W2320691067 @default.
- W2111497030 hasRelatedWork W2341849272 @default.
- W2111497030 hasRelatedWork W2899084033 @default.
- W2111497030 hasRelatedWork W83782503 @default.
- W2111497030 hasRelatedWork W2162940093 @default.
- W2111497030 hasVolume "12" @default.
- W2111497030 isParatext "false" @default.
- W2111497030 isRetracted "false" @default.
- W2111497030 magId "2111497030" @default.
- W2111497030 workType "article" @default.