FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2111569875> ?p ?o ?g. }

• W2111569875 abstract "We describe a 1/spl times/2 waveguide switch which is also a cantilever, fabricated in GaAs-based materials. This switch can be cascaded into 1/spl times/N structure. The layout and layer cross section of the waveguide are shown schematically. Actuation is accomplished by electrostatic means, by application of bias between the movable waveguide and static electrodes. This results in 4 /spl mu/m motion of the cantilevered waveguide in the plane of the wafer. The waveguide consists of 4 /spl mu/m thick GaAs/AlGaAs layer, while the release layer is composed of 2 /spl mu/m of Al/sub 0.7/Ga/sub 0.3/As. Metal contacts are deposited on a planar substrate prior to waveguide definition. Then 3 /spl mu/m wide waveguide is defined by RIBE. Photoresist is defined on the areas to be protected against release and sacrificial layer is removed by a HF-based wet etch. After photoresist removal, devices are sublimation dried. Fabrication issues, such as choice of materials, release chemistries and their implications are further discussed. Also, further details of device performance are given." @default.
• W2111569875 created "2016-06-24" @default.
• W2111569875 creator A5036758626 @default.
• W2111569875 creator A5042712024 @default.
• W2111569875 creator A5046051498 @default.
• W2111569875 creator A5072031167 @default.
• W2111569875 creator A5081897361 @default.
• W2111569875 date "2002-11-08" @default.
• W2111569875 modified "2023-09-26" @default.
• W2111569875 title "GaAs-based microelectromechanical waveguide switch" @default.
• W2111569875 cites W2060728988 @default.
• W2111569875 cites W2075327353 @default.
• W2111569875 doi "https://doi.org/10.1109/omems.2000.879617" @default.
• W2111569875 hasPublicationYear "2002" @default.
• W2111569875 type Work @default.
• W2111569875 sameAs 2111569875 @default.
• W2111569875 citedByCount "19" @default.
• W2111569875 countsByYear W21115698752015 @default.
• W2111569875 crossrefType "proceedings-article" @default.
• W2111569875 hasAuthorship W2111569875A5036758626 @default.
• W2111569875 hasAuthorship W2111569875A5042712024 @default.
• W2111569875 hasAuthorship W2111569875A5046051498 @default.
• W2111569875 hasAuthorship W2111569875A5072031167 @default.
• W2111569875 hasAuthorship W2111569875A5081897361 @default.
• W2111569875 hasConcept C105487726 @default.
• W2111569875 hasConcept C111368507 @default.
• W2111569875 hasConcept C120665830 @default.
• W2111569875 hasConcept C121332964 @default.
• W2111569875 hasConcept C121684516 @default.
• W2111569875 hasConcept C127313418 @default.
• W2111569875 hasConcept C134406635 @default.
• W2111569875 hasConcept C134786449 @default.
• W2111569875 hasConcept C136525101 @default.
• W2111569875 hasConcept C141354745 @default.
• W2111569875 hasConcept C142724271 @default.
• W2111569875 hasConcept C145667562 @default.
• W2111569875 hasConcept C159985019 @default.
• W2111569875 hasConcept C160671074 @default.
• W2111569875 hasConcept C171250308 @default.
• W2111569875 hasConcept C192562407 @default.
• W2111569875 hasConcept C200687136 @default.
• W2111569875 hasConcept C204787440 @default.
• W2111569875 hasConcept C2777289219 @default.
• W2111569875 hasConcept C2779227376 @default.
• W2111569875 hasConcept C37977207 @default.
• W2111569875 hasConcept C41008148 @default.
• W2111569875 hasConcept C49040817 @default.
• W2111569875 hasConcept C510052550 @default.
• W2111569875 hasConcept C71924100 @default.
• W2111569875 hasConceptScore W2111569875C105487726 @default.
• W2111569875 hasConceptScore W2111569875C111368507 @default.
• W2111569875 hasConceptScore W2111569875C120665830 @default.
• W2111569875 hasConceptScore W2111569875C121332964 @default.
• W2111569875 hasConceptScore W2111569875C121684516 @default.
• W2111569875 hasConceptScore W2111569875C127313418 @default.
• W2111569875 hasConceptScore W2111569875C134406635 @default.
• W2111569875 hasConceptScore W2111569875C134786449 @default.
• W2111569875 hasConceptScore W2111569875C136525101 @default.
• W2111569875 hasConceptScore W2111569875C141354745 @default.
• W2111569875 hasConceptScore W2111569875C142724271 @default.
• W2111569875 hasConceptScore W2111569875C145667562 @default.
• W2111569875 hasConceptScore W2111569875C159985019 @default.
• W2111569875 hasConceptScore W2111569875C160671074 @default.
• W2111569875 hasConceptScore W2111569875C171250308 @default.
• W2111569875 hasConceptScore W2111569875C192562407 @default.
• W2111569875 hasConceptScore W2111569875C200687136 @default.
• W2111569875 hasConceptScore W2111569875C204787440 @default.
• W2111569875 hasConceptScore W2111569875C2777289219 @default.
• W2111569875 hasConceptScore W2111569875C2779227376 @default.
• W2111569875 hasConceptScore W2111569875C37977207 @default.
• W2111569875 hasConceptScore W2111569875C41008148 @default.
• W2111569875 hasConceptScore W2111569875C49040817 @default.
• W2111569875 hasConceptScore W2111569875C510052550 @default.
• W2111569875 hasConceptScore W2111569875C71924100 @default.
• W2111569875 hasLocation W21115698751 @default.
• W2111569875 hasOpenAccess W2111569875 @default.
• W2111569875 hasPrimaryLocation W21115698751 @default.
• W2111569875 hasRelatedWork W1539984873 @default.
• W2111569875 hasRelatedWork W1549146076 @default.
• W2111569875 hasRelatedWork W1562149657 @default.
• W2111569875 hasRelatedWork W1569229273 @default.
• W2111569875 hasRelatedWork W1833871464 @default.
• W2111569875 hasRelatedWork W2019041156 @default.
• W2111569875 hasRelatedWork W2019137369 @default.
• W2111569875 hasRelatedWork W2035602325 @default.
• W2111569875 hasRelatedWork W2068305979 @default.
• W2111569875 hasRelatedWork W2137468369 @default.
• W2111569875 hasRelatedWork W2139672024 @default.
• W2111569875 hasRelatedWork W2147088780 @default.
• W2111569875 hasRelatedWork W2147605152 @default.
• W2111569875 hasRelatedWork W2150339097 @default.
• W2111569875 hasRelatedWork W2158258775 @default.
• W2111569875 hasRelatedWork W2168915692 @default.
• W2111569875 hasRelatedWork W2170102287 @default.
• W2111569875 hasRelatedWork W2170198451 @default.
• W2111569875 hasRelatedWork W2839831054 @default.
• W2111569875 hasRelatedWork W2860288518 @default.
• W2111569875 isParatext "false" @default.
• W2111569875 isRetracted "false" @default.
• W2111569875 magId "2111569875" @default.

• next