Matches in SemOpenAlex for { <https://semopenalex.org/work/W2111908923> ?p ?o ?g. }
- W2111908923 endingPage "075303" @default.
- W2111908923 startingPage "075303" @default.
- W2111908923 abstract "A new method has been developed to selectively fabricate nano-gap electrodes and nano-channels by conventional lithography. Based on a sacrificial spacer process, we have successfully obtained sub-100-nm nano-gap electrodes and nano-channels and further reduced the dimensions to 20 nm by shrinking the sacrificial spacer size. Our method shows good selectivity between nano-gap electrodes and nano-channels due to different sacrificial spacer etch conditions. There is no length limit for the nano-gap electrode and the nano-channel. The method reported in this paper also allows for wafer scale fabrication, high throughput, low cost, and good compatibility with modern semiconductor technology." @default.
- W2111908923 created "2016-06-24" @default.
- W2111908923 creator A5000562554 @default.
- W2111908923 creator A5014794892 @default.
- W2111908923 creator A5027969363 @default.
- W2111908923 creator A5041097208 @default.
- W2111908923 creator A5045498103 @default.
- W2111908923 creator A5070363628 @default.
- W2111908923 creator A5089005116 @default.
- W2111908923 date "2010-01-21" @default.
- W2111908923 modified "2023-10-14" @default.
- W2111908923 title "Selective and lithography-independent fabrication of 20 nm nano-gap electrodes and nano-channels for nanoelectrofluidics applications" @default.
- W2111908923 cites W1964824061 @default.
- W2111908923 cites W1969237062 @default.
- W2111908923 cites W1969261598 @default.
- W2111908923 cites W1971855362 @default.
- W2111908923 cites W1978743366 @default.
- W2111908923 cites W1984321171 @default.
- W2111908923 cites W1998782357 @default.
- W2111908923 cites W2001512283 @default.
- W2111908923 cites W2001682745 @default.
- W2111908923 cites W2016250528 @default.
- W2111908923 cites W2016666664 @default.
- W2111908923 cites W2017742181 @default.
- W2111908923 cites W2022688188 @default.
- W2111908923 cites W2031387252 @default.
- W2111908923 cites W2047102627 @default.
- W2111908923 cites W2047447857 @default.
- W2111908923 cites W2048440571 @default.
- W2111908923 cites W2048608645 @default.
- W2111908923 cites W2054998582 @default.
- W2111908923 cites W2055592635 @default.
- W2111908923 cites W2061687256 @default.
- W2111908923 cites W2073875816 @default.
- W2111908923 cites W2082692696 @default.
- W2111908923 cites W2083838484 @default.
- W2111908923 cites W2090345948 @default.
- W2111908923 cites W2095574592 @default.
- W2111908923 cites W2101262918 @default.
- W2111908923 cites W2104623735 @default.
- W2111908923 cites W2117866818 @default.
- W2111908923 cites W2118463270 @default.
- W2111908923 cites W2124463114 @default.
- W2111908923 cites W2139628267 @default.
- W2111908923 cites W2140795224 @default.
- W2111908923 cites W3101805084 @default.
- W2111908923 cites W4245668194 @default.
- W2111908923 doi "https://doi.org/10.1088/0957-4484/21/7/075303" @default.
- W2111908923 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/20090195" @default.
- W2111908923 hasPublicationYear "2010" @default.
- W2111908923 type Work @default.
- W2111908923 sameAs 2111908923 @default.
- W2111908923 citedByCount "9" @default.
- W2111908923 countsByYear W21119089232012 @default.
- W2111908923 countsByYear W21119089232014 @default.
- W2111908923 countsByYear W21119089232017 @default.
- W2111908923 countsByYear W21119089232020 @default.
- W2111908923 countsByYear W21119089232022 @default.
- W2111908923 countsByYear W21119089232023 @default.
- W2111908923 crossrefType "journal-article" @default.
- W2111908923 hasAuthorship W2111908923A5000562554 @default.
- W2111908923 hasAuthorship W2111908923A5014794892 @default.
- W2111908923 hasAuthorship W2111908923A5027969363 @default.
- W2111908923 hasAuthorship W2111908923A5041097208 @default.
- W2111908923 hasAuthorship W2111908923A5045498103 @default.
- W2111908923 hasAuthorship W2111908923A5070363628 @default.
- W2111908923 hasAuthorship W2111908923A5089005116 @default.
- W2111908923 hasConcept C136525101 @default.
- W2111908923 hasConcept C142724271 @default.
- W2111908923 hasConcept C147789679 @default.
- W2111908923 hasConcept C159985019 @default.
- W2111908923 hasConcept C160671074 @default.
- W2111908923 hasConcept C171250308 @default.
- W2111908923 hasConcept C17525397 @default.
- W2111908923 hasConcept C185592680 @default.
- W2111908923 hasConcept C192562407 @default.
- W2111908923 hasConcept C204223013 @default.
- W2111908923 hasConcept C204787440 @default.
- W2111908923 hasConcept C2779227376 @default.
- W2111908923 hasConcept C2780357685 @default.
- W2111908923 hasConcept C45206210 @default.
- W2111908923 hasConcept C49040817 @default.
- W2111908923 hasConcept C53524968 @default.
- W2111908923 hasConcept C71924100 @default.
- W2111908923 hasConceptScore W2111908923C136525101 @default.
- W2111908923 hasConceptScore W2111908923C142724271 @default.
- W2111908923 hasConceptScore W2111908923C147789679 @default.
- W2111908923 hasConceptScore W2111908923C159985019 @default.
- W2111908923 hasConceptScore W2111908923C160671074 @default.
- W2111908923 hasConceptScore W2111908923C171250308 @default.
- W2111908923 hasConceptScore W2111908923C17525397 @default.
- W2111908923 hasConceptScore W2111908923C185592680 @default.
- W2111908923 hasConceptScore W2111908923C192562407 @default.
- W2111908923 hasConceptScore W2111908923C204223013 @default.
- W2111908923 hasConceptScore W2111908923C204787440 @default.
- W2111908923 hasConceptScore W2111908923C2779227376 @default.
- W2111908923 hasConceptScore W2111908923C2780357685 @default.
- W2111908923 hasConceptScore W2111908923C45206210 @default.