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- W2111948731 abstract "With the development of quantitive measures of current-voltage characteristics (CHARM(R)-2) and a beam-plasma model for charge flows to and from the wafer surface, a more comprehensive view of wafer charging has emerged. A beam-plasma model has been developed which describes both positive and negative current-voltage characteristics of the beam plasma. A quantitative description has been achieved for a variety of charge control systems; including dense and dilute plasma flows, electron showers as well as for photoresist outgassing effects." @default.
- W2111948731 created "2016-06-24" @default.
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- W2111948731 date "2002-12-24" @default.
- W2111948731 modified "2023-09-23" @default.
- W2111948731 title "Beam-plasma concepts for wafer charging control during ion implantation" @default.
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- W2111948731 doi "https://doi.org/10.1109/iit.1996.586119" @default.
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