Matches in SemOpenAlex for { <https://semopenalex.org/work/W2112014749> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2112014749 endingPage "6187" @default.
- W2112014749 startingPage "6187" @default.
- W2112014749 abstract "To clarify the influence of crystal-originated “particles” (COPs) on gate oxide integrity (GOI), a new GOI evaluation method has been developed. This method compares the GOI of a metal oxide silicon (MOS) capacitor which includes a COP with a MOS capacitor that is COP-free by measuring the capacitors' I–V characteristics. Furthermore, to study the relationship between the shape of COP and GOI, the COP microstructure on the wafers was observed by atomic force microscopy (AFM) in the as-received state, after NH 4 OH/H 2 O 2 /H 2 O (SC-1) cleaning, high temperature annealing and repolishing. It was found that the presence of COP was the main cause of GOI failure and also that the shape of COP was closely related to the GOI yield. The microstructure of the original COP in a crystal is concluded to be an octahedral void and the same as an IR scattering defect." @default.
- W2112014749 created "2016-06-24" @default.
- W2112014749 creator A5027634720 @default.
- W2112014749 creator A5029069259 @default.
- W2112014749 creator A5049252260 @default.
- W2112014749 creator A5054114626 @default.
- W2112014749 creator A5059499830 @default.
- W2112014749 creator A5058889550 @default.
- W2112014749 date "1997-10-01" @default.
- W2112014749 modified "2023-09-24" @default.
- W2112014749 title "Influence of Crystal-Originated “Particle” Microstructure on Silicon Wafers on Gate Oxide Integrity" @default.
- W2112014749 cites W2050242568 @default.
- W2112014749 cites W2059074511 @default.
- W2112014749 cites W2094647600 @default.
- W2112014749 cites W2094846276 @default.
- W2112014749 cites W2117401640 @default.
- W2112014749 doi "https://doi.org/10.1143/jjap.36.6187" @default.
- W2112014749 hasPublicationYear "1997" @default.
- W2112014749 type Work @default.
- W2112014749 sameAs 2112014749 @default.
- W2112014749 citedByCount "35" @default.
- W2112014749 countsByYear W21120147492013 @default.
- W2112014749 countsByYear W21120147492014 @default.
- W2112014749 countsByYear W21120147492015 @default.
- W2112014749 countsByYear W21120147492019 @default.
- W2112014749 countsByYear W21120147492021 @default.
- W2112014749 countsByYear W21120147492023 @default.
- W2112014749 crossrefType "journal-article" @default.
- W2112014749 hasAuthorship W2112014749A5027634720 @default.
- W2112014749 hasAuthorship W2112014749A5029069259 @default.
- W2112014749 hasAuthorship W2112014749A5049252260 @default.
- W2112014749 hasAuthorship W2112014749A5054114626 @default.
- W2112014749 hasAuthorship W2112014749A5058889550 @default.
- W2112014749 hasAuthorship W2112014749A5059499830 @default.
- W2112014749 hasConcept C119599485 @default.
- W2112014749 hasConcept C127413603 @default.
- W2112014749 hasConcept C159985019 @default.
- W2112014749 hasConcept C160671074 @default.
- W2112014749 hasConcept C165801399 @default.
- W2112014749 hasConcept C191897082 @default.
- W2112014749 hasConcept C192562407 @default.
- W2112014749 hasConcept C199360897 @default.
- W2112014749 hasConcept C2777855556 @default.
- W2112014749 hasConcept C2779772531 @default.
- W2112014749 hasConcept C2779851234 @default.
- W2112014749 hasConcept C2781285689 @default.
- W2112014749 hasConcept C41008148 @default.
- W2112014749 hasConcept C49040817 @default.
- W2112014749 hasConcept C52192207 @default.
- W2112014749 hasConcept C544956773 @default.
- W2112014749 hasConcept C87976508 @default.
- W2112014749 hasConceptScore W2112014749C119599485 @default.
- W2112014749 hasConceptScore W2112014749C127413603 @default.
- W2112014749 hasConceptScore W2112014749C159985019 @default.
- W2112014749 hasConceptScore W2112014749C160671074 @default.
- W2112014749 hasConceptScore W2112014749C165801399 @default.
- W2112014749 hasConceptScore W2112014749C191897082 @default.
- W2112014749 hasConceptScore W2112014749C192562407 @default.
- W2112014749 hasConceptScore W2112014749C199360897 @default.
- W2112014749 hasConceptScore W2112014749C2777855556 @default.
- W2112014749 hasConceptScore W2112014749C2779772531 @default.
- W2112014749 hasConceptScore W2112014749C2779851234 @default.
- W2112014749 hasConceptScore W2112014749C2781285689 @default.
- W2112014749 hasConceptScore W2112014749C41008148 @default.
- W2112014749 hasConceptScore W2112014749C49040817 @default.
- W2112014749 hasConceptScore W2112014749C52192207 @default.
- W2112014749 hasConceptScore W2112014749C544956773 @default.
- W2112014749 hasConceptScore W2112014749C87976508 @default.
- W2112014749 hasIssue "10R" @default.
- W2112014749 hasLocation W21120147491 @default.
- W2112014749 hasOpenAccess W2112014749 @default.
- W2112014749 hasPrimaryLocation W21120147491 @default.
- W2112014749 hasRelatedWork W1964478537 @default.
- W2112014749 hasRelatedWork W2006022085 @default.
- W2112014749 hasRelatedWork W2028024115 @default.
- W2112014749 hasRelatedWork W2042779311 @default.
- W2112014749 hasRelatedWork W2058945371 @default.
- W2112014749 hasRelatedWork W2131691241 @default.
- W2112014749 hasRelatedWork W2214936313 @default.
- W2112014749 hasRelatedWork W2347531304 @default.
- W2112014749 hasRelatedWork W2351679394 @default.
- W2112014749 hasRelatedWork W3140606426 @default.
- W2112014749 hasVolume "36" @default.
- W2112014749 isParatext "false" @default.
- W2112014749 isRetracted "false" @default.
- W2112014749 magId "2112014749" @default.
- W2112014749 workType "article" @default.