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- W2112322182 abstract "Dynamic characteristics of MEMS components shows nonlinear features, therefore, traditional linear analysis methods can not satisfy the design precision of micro-electromechanical system, and small parameter perturbation method provides an effective solution. In this paper, Linz Ted-poincare' method is used to solve the forced dynamic responses of electromechanical coupled micro-plate system, simple supported at three sides and free at one side plate. The dynamic responses satisfied precisions are obtained, and the forced dynamic response regularities and amplitude-frequency characteristics are summarized. The calculation results indicate that the dynamic responses based on nonlinear analysis methods have higher precision; the solution not only increases the systemic design rationality, but also improves design precision." @default.
- W2112322182 created "2016-06-24" @default.
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- W2112322182 date "2009-08-01" @default.
- W2112322182 modified "2023-09-24" @default.
- W2112322182 title "Nonlinear forced vibration for an electromechanical coupled micro-plate simple supported at three sides and free at one side" @default.
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- W2112322182 doi "https://doi.org/10.1109/icma.2009.5246550" @default.
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