Matches in SemOpenAlex for { <https://semopenalex.org/work/W2112366909> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2112366909 abstract "Post deposited Annealing of high-permittivity HfTiO gate dielectrics on Ge substrate in different gases (N2, NO and N2O) is investigated, and sub-nanometer equivalent oxide thickness (EOT) HfTiO dielectric has been achieved. Results of Transmission Electron Microscope (TEM), Atomic Force Microscope (AFM) and electrical measurement indicate that wet N2 annealing can greatly suppress the growth of interlayer at the dielectric/Ge substrate interface, while wet NO and N2O annealing reduce equivalent permittivity of dielectric due to the growth of GeON interlayer." @default.
- W2112366909 created "2016-06-24" @default.
- W2112366909 creator A5001758685 @default.
- W2112366909 creator A5034218390 @default.
- W2112366909 creator A5076697107 @default.
- W2112366909 creator A5082352859 @default.
- W2112366909 date "2008-01-01" @default.
- W2112366909 modified "2023-10-17" @default.
- W2112366909 title "Effects of post deposited Annealing on Ge MOS capacitors with sub-nanometer EOT HfTiO gate dielectric" @default.
- W2112366909 cites W1524924195 @default.
- W2112366909 cites W1999802611 @default.
- W2112366909 cites W2002765787 @default.
- W2112366909 cites W2030910788 @default.
- W2112366909 cites W2047128083 @default.
- W2112366909 cites W2047960727 @default.
- W2112366909 cites W2062403441 @default.
- W2112366909 cites W2086421729 @default.
- W2112366909 cites W2114765141 @default.
- W2112366909 cites W2125074739 @default.
- W2112366909 cites W2158361930 @default.
- W2112366909 cites W30667999 @default.
- W2112366909 doi "https://doi.org/10.1109/nems.2008.4484352" @default.
- W2112366909 hasPublicationYear "2008" @default.
- W2112366909 type Work @default.
- W2112366909 sameAs 2112366909 @default.
- W2112366909 citedByCount "0" @default.
- W2112366909 crossrefType "proceedings-article" @default.
- W2112366909 hasAuthorship W2112366909A5001758685 @default.
- W2112366909 hasAuthorship W2112366909A5034218390 @default.
- W2112366909 hasAuthorship W2112366909A5076697107 @default.
- W2112366909 hasAuthorship W2112366909A5082352859 @default.
- W2112366909 hasConcept C119599485 @default.
- W2112366909 hasConcept C127413603 @default.
- W2112366909 hasConcept C133386390 @default.
- W2112366909 hasConcept C146088050 @default.
- W2112366909 hasConcept C159985019 @default.
- W2112366909 hasConcept C16317505 @default.
- W2112366909 hasConcept C165801399 @default.
- W2112366909 hasConcept C166972891 @default.
- W2112366909 hasConcept C168651791 @default.
- W2112366909 hasConcept C171250308 @default.
- W2112366909 hasConcept C172385210 @default.
- W2112366909 hasConcept C192562407 @default.
- W2112366909 hasConcept C2361726 @default.
- W2112366909 hasConcept C24326235 @default.
- W2112366909 hasConcept C2777855556 @default.
- W2112366909 hasConcept C36003996 @default.
- W2112366909 hasConcept C49040817 @default.
- W2112366909 hasConcept C52192207 @default.
- W2112366909 hasConcept C52780932 @default.
- W2112366909 hasConcept C77066764 @default.
- W2112366909 hasConceptScore W2112366909C119599485 @default.
- W2112366909 hasConceptScore W2112366909C127413603 @default.
- W2112366909 hasConceptScore W2112366909C133386390 @default.
- W2112366909 hasConceptScore W2112366909C146088050 @default.
- W2112366909 hasConceptScore W2112366909C159985019 @default.
- W2112366909 hasConceptScore W2112366909C16317505 @default.
- W2112366909 hasConceptScore W2112366909C165801399 @default.
- W2112366909 hasConceptScore W2112366909C166972891 @default.
- W2112366909 hasConceptScore W2112366909C168651791 @default.
- W2112366909 hasConceptScore W2112366909C171250308 @default.
- W2112366909 hasConceptScore W2112366909C172385210 @default.
- W2112366909 hasConceptScore W2112366909C192562407 @default.
- W2112366909 hasConceptScore W2112366909C2361726 @default.
- W2112366909 hasConceptScore W2112366909C24326235 @default.
- W2112366909 hasConceptScore W2112366909C2777855556 @default.
- W2112366909 hasConceptScore W2112366909C36003996 @default.
- W2112366909 hasConceptScore W2112366909C49040817 @default.
- W2112366909 hasConceptScore W2112366909C52192207 @default.
- W2112366909 hasConceptScore W2112366909C52780932 @default.
- W2112366909 hasConceptScore W2112366909C77066764 @default.
- W2112366909 hasLocation W21123669091 @default.
- W2112366909 hasOpenAccess W2112366909 @default.
- W2112366909 hasPrimaryLocation W21123669091 @default.
- W2112366909 hasRelatedWork W1516192784 @default.
- W2112366909 hasRelatedWork W1529864945 @default.
- W2112366909 hasRelatedWork W1564788367 @default.
- W2112366909 hasRelatedWork W1575453056 @default.
- W2112366909 hasRelatedWork W1626194304 @default.
- W2112366909 hasRelatedWork W1978991026 @default.
- W2112366909 hasRelatedWork W2006169333 @default.
- W2112366909 hasRelatedWork W2031852880 @default.
- W2112366909 hasRelatedWork W2049206237 @default.
- W2112366909 hasRelatedWork W2054575535 @default.
- W2112366909 hasRelatedWork W2073458933 @default.
- W2112366909 hasRelatedWork W2092764553 @default.
- W2112366909 hasRelatedWork W2108108614 @default.
- W2112366909 hasRelatedWork W2125074739 @default.
- W2112366909 hasRelatedWork W2126993916 @default.
- W2112366909 hasRelatedWork W2160966165 @default.
- W2112366909 hasRelatedWork W2297044651 @default.
- W2112366909 hasRelatedWork W2375330958 @default.
- W2112366909 hasRelatedWork W2743817482 @default.
- W2112366909 hasRelatedWork W2775020835 @default.
- W2112366909 isParatext "false" @default.
- W2112366909 isRetracted "false" @default.
- W2112366909 magId "2112366909" @default.
- W2112366909 workType "article" @default.