FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2112472010> ?p ?o ?g. }

• W2112472010 abstract "Publisher SummaryThere are three main problems relating to reactive sputtering—target poisoning, which leads to arcing; the disappearing anode; and the hysteresis of the reactive process that is particularly bad with underpumped systems. There are two types of preconditioning. First, there is the preconditioning of alloy targets. Initially, targets have to sputtered away some of the faster sputtering component (or components) to bring the surface composition to a balance. Once the sputtering surface has reached the balance composition, the system will then deposit a reproducible alloy from the alloy target. The second preconditioning is to remove any buildup of compounds formed since the last time the target was used. The difference in sputtering rates of the metal and oxide surface gives rise to a hysteresis loop. A suitable monitoring tool is critical to all types of control. Monitoring the coating on the web after the deposition zone works well for metalizing where the coating speed is up to 1000 m/min. The most popular options for fast monitoring are using an amplified and offset pressure signal from a Baratron or Pirani gauge, to use the output from a mass spectrometer, a plasma emission monitor, or a lambda oxygen partial pressure monitor." @default.
• W2112472010 created "2016-06-24" @default.
• W2112472010 creator A5010284552 @default.
• W2112472010 date "2011-01-01" @default.
• W2112472010 modified "2023-09-24" @default.
• W2112472010 title "Reactive Sputter Deposition" @default.
• W2112472010 cites W1968805056 @default.
• W2112472010 cites W1978125259 @default.
• W2112472010 cites W1980148802 @default.
• W2112472010 cites W1994912682 @default.
• W2112472010 cites W2002854469 @default.
• W2112472010 cites W2011709037 @default.
• W2112472010 cites W2014480904 @default.
• W2112472010 cites W2015281835 @default.
• W2112472010 cites W2018617886 @default.
• W2112472010 cites W2022130466 @default.
• W2112472010 cites W2025284863 @default.
• W2112472010 cites W2029634573 @default.
• W2112472010 cites W2030839811 @default.
• W2112472010 cites W2035711282 @default.
• W2112472010 cites W2040870129 @default.
• W2112472010 cites W2053759317 @default.
• W2112472010 cites W2058732072 @default.
• W2112472010 cites W2087545241 @default.
• W2112472010 cites W2090660906 @default.
• W2112472010 cites W2032277893 @default.
• W2112472010 cites W2183623980 @default.
• W2112472010 doi "https://doi.org/10.1016/b978-1-4377-7867-0.00022-2" @default.
• W2112472010 hasPublicationYear "2011" @default.
• W2112472010 type Work @default.
• W2112472010 sameAs 2112472010 @default.
• W2112472010 citedByCount "1" @default.
• W2112472010 countsByYear W21124720102014 @default.
• W2112472010 crossrefType "book-chapter" @default.
• W2112472010 hasAuthorship W2112472010A5010284552 @default.
• W2112472010 hasConcept C113196181 @default.
• W2112472010 hasConcept C116915560 @default.
• W2112472010 hasConcept C127413603 @default.
• W2112472010 hasConcept C151730666 @default.
• W2112472010 hasConcept C159985019 @default.
• W2112472010 hasConcept C171250308 @default.
• W2112472010 hasConcept C178790620 @default.
• W2112472010 hasConcept C185592680 @default.
• W2112472010 hasConcept C19067145 @default.
• W2112472010 hasConcept C191897082 @default.
• W2112472010 hasConcept C192562407 @default.
• W2112472010 hasConcept C22423302 @default.
• W2112472010 hasConcept C2779851234 @default.
• W2112472010 hasConcept C2780026712 @default.
• W2112472010 hasConcept C2781448156 @default.
• W2112472010 hasConcept C2816523 @default.
• W2112472010 hasConcept C43617362 @default.
• W2112472010 hasConcept C540031477 @default.
• W2112472010 hasConcept C64297162 @default.
• W2112472010 hasConcept C68463220 @default.
• W2112472010 hasConcept C86803240 @default.
• W2112472010 hasConceptScore W2112472010C113196181 @default.
• W2112472010 hasConceptScore W2112472010C116915560 @default.
• W2112472010 hasConceptScore W2112472010C127413603 @default.
• W2112472010 hasConceptScore W2112472010C151730666 @default.
• W2112472010 hasConceptScore W2112472010C159985019 @default.
• W2112472010 hasConceptScore W2112472010C171250308 @default.
• W2112472010 hasConceptScore W2112472010C178790620 @default.
• W2112472010 hasConceptScore W2112472010C185592680 @default.
• W2112472010 hasConceptScore W2112472010C19067145 @default.
• W2112472010 hasConceptScore W2112472010C191897082 @default.
• W2112472010 hasConceptScore W2112472010C192562407 @default.
• W2112472010 hasConceptScore W2112472010C22423302 @default.
• W2112472010 hasConceptScore W2112472010C2779851234 @default.
• W2112472010 hasConceptScore W2112472010C2780026712 @default.
• W2112472010 hasConceptScore W2112472010C2781448156 @default.
• W2112472010 hasConceptScore W2112472010C2816523 @default.
• W2112472010 hasConceptScore W2112472010C43617362 @default.
• W2112472010 hasConceptScore W2112472010C540031477 @default.
• W2112472010 hasConceptScore W2112472010C64297162 @default.
• W2112472010 hasConceptScore W2112472010C68463220 @default.
• W2112472010 hasConceptScore W2112472010C86803240 @default.
• W2112472010 hasLocation W21124720101 @default.
• W2112472010 hasOpenAccess W2112472010 @default.
• W2112472010 hasPrimaryLocation W21124720101 @default.
• W2112472010 hasRelatedWork W1971510066 @default.
• W2112472010 hasRelatedWork W1987204706 @default.
• W2112472010 hasRelatedWork W2008403994 @default.
• W2112472010 hasRelatedWork W2017048033 @default.
• W2112472010 hasRelatedWork W2132292182 @default.
• W2112472010 hasRelatedWork W2187416054 @default.
• W2112472010 hasRelatedWork W2314401678 @default.
• W2112472010 hasRelatedWork W3021166961 @default.
• W2112472010 hasRelatedWork W3136599085 @default.
• W2112472010 hasRelatedWork W1506752592 @default.
• W2112472010 hasRelatedWork W1577227216 @default.
• W2112472010 hasRelatedWork W1578320474 @default.
• W2112472010 hasRelatedWork W2264353455 @default.
• W2112472010 hasRelatedWork W2404219550 @default.
• W2112472010 hasRelatedWork W2822020081 @default.
• W2112472010 hasRelatedWork W2859342826 @default.
• W2112472010 hasRelatedWork W2881714094 @default.
• W2112472010 hasRelatedWork W2923595644 @default.
• W2112472010 hasRelatedWork W2934990231 @default.
• W2112472010 hasRelatedWork W3141352323 @default.

• next