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- W2112535294 abstract "An IC process characterization facility has been established which is heavily based upon an integrated network environment (Ethernet). This environment represents an instance of what has been referred to as the factory of the future. The extraction of device parameters suitable for circuit simulation is discussed as one function of such a facility." @default.
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- W2112535294 date "1983-01-01" @default.
- W2112535294 modified "2023-09-26" @default.
- W2112535294 title "An integrated IC process characterization facility" @default.
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- W2112535294 doi "https://doi.org/10.1109/iedm.1983.190487" @default.
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