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• W2112552016 abstract "In this study, lithium phosphorus oxynitride (LiPON) thin films were deposited by radio frequency (r.f.) magnetron sputtering of a lithium phosphate (Li3PO4) target with various powers. The crystal structure, morphology, chemical environment, ionic conductivity, electronic state and coordination type were sequentially characterized by X-ray diffraction, scanning electron microscope, X-ray photoelectron spectroscopy, electrochemical impedance spectroscopy and X-ray absorption spectroscopy, respectively. As the results, the optimal ionic conductivity was achieved by the r.f. power of 75 W. Furthermore, the P-N valence states of hybrid orbitals were increased with increasing the nitrogen amounts." @default.
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• W2112552016 date "2012-07-03" @default.
• W2112552016 modified "2023-09-26" @default.
• W2112552016 title "X-ray Absorption Spectroscopy Approaches to Electronic State and Coordination Type of Lithium Phosphorus Oxynitride Thin Films" @default.
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• W2112552016 doi "https://doi.org/10.1002/jccs.201200141" @default.
• W2112552016 hasPublicationYear "2012" @default.
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