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- W2112611558 abstract "Poly-crystalline Silicon-Germanium is a promising structural material for post-processing Micro Electro-Mechanical Systems (MEMS) above CMOS due to its excellent mechanical and electrical properties when deposited at CMOS compatible temperatures. In this work we demonstrate a technique of removing unwanted interfacial (silicon-) germanium oxide layers that form on the surface of SiGe depositions as soon as the wafers are removed from the deposition chamber and exposed to an O2 ambient." @default.
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- W2112611558 date "2010-10-08" @default.
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- W2112611558 title "Development, Optimization and Evaluation of a CF<sub>4</sub> Pretreatment Process to Remove Unwanted Interfacial Layers in Stacks of CVD and PECVD Polycrystalline Silicon-Germanium for MEMS Applications" @default.
- W2112611558 doi "https://doi.org/10.1149/1.3489934" @default.
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