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- W2112708442 abstract "We recently built an Inductively-Coupled Remote Plasma-Enhanced Chemical Vapor Deposition (ICPECVD) system for deposition of dielectric and semi-conducting layers at low substrate temperatures (~150" @default.
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- W2112708442 date "2005-11-17" @default.
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- W2112708442 title "A high-density inductively-coupled remote plasma system for the deposition of dielectrics and semiconductors" @default.
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