Matches in SemOpenAlex for { <https://semopenalex.org/work/W2112878312> ?p ?o ?g. }
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85
with 100 items per page.
- W2112878312 endingPage "293" @default.
- W2112878312 startingPage "289" @default.
- W2112878312 abstract "Low temperature deposition (LTD) is an actual frontier in materials sicence and engineering, especially for thin film technology. In this paper the fundamentals and processing of low temperature deposition of TiN coating are reviewed. The prerequisites of a low temperature deposition process are enough good densification, hardness and adhesion of the deposited coating. The fundamentals of low temperature deposition are structure zone model and nonequilibrium plasma vapor growth in a combined DC and pulsed electromagnetic fields, namely a combination of a DC bias voltage superimposed by a DC pulsed bias voltage with variable frequency and peak voltage height. Low temperature deposition processing can be realized simply with only stationary electric fields. However, sensitivity of the product quality to the process parameters is the main barrier of this processing in the way to mass production. Low temperature deposition processing using the effects of a combined DC and pulsed electromagnetic fields has attained some promising results for the future commercialization. But they need still further systematic and deep study. The application of low temperature deposition processing is not limited in range of low melting substrate materials. It is also important for internal stress control, defect minimization, microstructure densification and performance improvement for coatings on broad spectrum of substrate materials as well as for different types of applications." @default.
- W2112878312 created "2016-06-24" @default.
- W2112878312 creator A5021605748 @default.
- W2112878312 creator A5080549686 @default.
- W2112878312 date "1998-07-28" @default.
- W2112878312 modified "2023-10-03" @default.
- W2112878312 title "Low temperature deposition of titanium nitride" @default.
- W2112878312 hasPublicationYear "1998" @default.
- W2112878312 type Work @default.
- W2112878312 sameAs 2112878312 @default.
- W2112878312 citedByCount "0" @default.
- W2112878312 crossrefType "journal-article" @default.
- W2112878312 hasAuthorship W2112878312A5021605748 @default.
- W2112878312 hasAuthorship W2112878312A5080549686 @default.
- W2112878312 hasConcept C111368507 @default.
- W2112878312 hasConcept C127313418 @default.
- W2112878312 hasConcept C127413603 @default.
- W2112878312 hasConcept C151730666 @default.
- W2112878312 hasConcept C159985019 @default.
- W2112878312 hasConcept C171250308 @default.
- W2112878312 hasConcept C19067145 @default.
- W2112878312 hasConcept C191897082 @default.
- W2112878312 hasConcept C192562407 @default.
- W2112878312 hasConcept C22423302 @default.
- W2112878312 hasConcept C24326235 @default.
- W2112878312 hasConcept C2777289219 @default.
- W2112878312 hasConcept C2781083372 @default.
- W2112878312 hasConcept C2781448156 @default.
- W2112878312 hasConcept C2816523 @default.
- W2112878312 hasConcept C49040817 @default.
- W2112878312 hasConcept C525849907 @default.
- W2112878312 hasConcept C61427134 @default.
- W2112878312 hasConcept C64297162 @default.
- W2112878312 hasConcept C86803240 @default.
- W2112878312 hasConceptScore W2112878312C111368507 @default.
- W2112878312 hasConceptScore W2112878312C127313418 @default.
- W2112878312 hasConceptScore W2112878312C127413603 @default.
- W2112878312 hasConceptScore W2112878312C151730666 @default.
- W2112878312 hasConceptScore W2112878312C159985019 @default.
- W2112878312 hasConceptScore W2112878312C171250308 @default.
- W2112878312 hasConceptScore W2112878312C19067145 @default.
- W2112878312 hasConceptScore W2112878312C191897082 @default.
- W2112878312 hasConceptScore W2112878312C192562407 @default.
- W2112878312 hasConceptScore W2112878312C22423302 @default.
- W2112878312 hasConceptScore W2112878312C24326235 @default.
- W2112878312 hasConceptScore W2112878312C2777289219 @default.
- W2112878312 hasConceptScore W2112878312C2781083372 @default.
- W2112878312 hasConceptScore W2112878312C2781448156 @default.
- W2112878312 hasConceptScore W2112878312C2816523 @default.
- W2112878312 hasConceptScore W2112878312C49040817 @default.
- W2112878312 hasConceptScore W2112878312C525849907 @default.
- W2112878312 hasConceptScore W2112878312C61427134 @default.
- W2112878312 hasConceptScore W2112878312C64297162 @default.
- W2112878312 hasConceptScore W2112878312C86803240 @default.
- W2112878312 hasIssue "4" @default.
- W2112878312 hasLocation W21128783121 @default.
- W2112878312 hasOpenAccess W2112878312 @default.
- W2112878312 hasPrimaryLocation W21128783121 @default.
- W2112878312 hasRelatedWork W149805073 @default.
- W2112878312 hasRelatedWork W1950979778 @default.
- W2112878312 hasRelatedWork W1966636545 @default.
- W2112878312 hasRelatedWork W2003379956 @default.
- W2112878312 hasRelatedWork W2017978292 @default.
- W2112878312 hasRelatedWork W2098367004 @default.
- W2112878312 hasRelatedWork W2185206621 @default.
- W2112878312 hasRelatedWork W2286257164 @default.
- W2112878312 hasRelatedWork W2567483617 @default.
- W2112878312 hasRelatedWork W2883279629 @default.
- W2112878312 hasRelatedWork W2895742869 @default.
- W2112878312 hasRelatedWork W2896363040 @default.
- W2112878312 hasRelatedWork W3017428567 @default.
- W2112878312 hasRelatedWork W3091053487 @default.
- W2112878312 hasRelatedWork W1012397570 @default.
- W2112878312 hasRelatedWork W2182822879 @default.
- W2112878312 hasRelatedWork W2225924272 @default.
- W2112878312 hasRelatedWork W2273778726 @default.
- W2112878312 hasRelatedWork W2816110205 @default.
- W2112878312 hasRelatedWork W2845048951 @default.
- W2112878312 hasVolume "14" @default.
- W2112878312 isParatext "false" @default.
- W2112878312 isRetracted "false" @default.
- W2112878312 magId "2112878312" @default.
- W2112878312 workType "article" @default.