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- W2113007275 abstract "During the processing of CMOS with embedded NVM, an issue with the tunnel oxide was discovered. On part of the wafer, the tunnel oxide was very leaky and had a charge to breakdown (QBD) that was close to zero. The sensitivity of a capacitor test structure towards degradation due to the cleaning prior to the oxidation is depending very much on the design of the test structure. A very strong impact of the isolation of the test structure is observed. Gate oxide grown on a P-type well, that is electrically isolated by multiple junctions from exposed N-type well, was found to be very sensitive to Si surface cleaning treatment prior to the oxidation. When both P-type and N-type Si with only a single junction in between are exposed during this cleaning, then the oxide grown in the P-type silicon becomes very robust and insensitive to the surface treatment prior to the oxidation. Evidence is brought that the improvement of this P-type Si is due to the occurrence of an electrolytic cell in the Si during the cleaning. The electrolytic cell is formed by the exposed N- and P-type regions as electrodes and the cleaning chemicals as electrolyte. In this cell, the exposed N-type region is protecting the exposed P-type region against degradation of the Si surface during this cleaning treatment prior to the tunnel oxidation. As far as we know, for the first time it is demonstrated that with the proper design of connected N-type and P-well regions, it is possible to establish a very robust tunnel oxide in a P-type well that is insensitive to process variations during the cleaning of Si prior to the tunnel oxidation." @default.
- W2113007275 created "2016-06-24" @default.
- W2113007275 creator A5005912180 @default.
- W2113007275 creator A5019982316 @default.
- W2113007275 creator A5022015236 @default.
- W2113007275 creator A5047673283 @default.
- W2113007275 creator A5059171292 @default.
- W2113007275 creator A5066088803 @default.
- W2113007275 creator A5070945211 @default.
- W2113007275 date "2005-01-01" @default.
- W2113007275 modified "2023-09-23" @default.
- W2113007275 title "Improvement of non volatile memory tunnel oxide robustness and integrity by design optimization of the memory cell" @default.
- W2113007275 cites W1595312758 @default.
- W2113007275 cites W1641233872 @default.
- W2113007275 cites W1988889185 @default.
- W2113007275 cites W2111362065 @default.
- W2113007275 cites W80546046 @default.
- W2113007275 doi "https://doi.org/10.1109/icicdt.2005.1502602" @default.
- W2113007275 hasPublicationYear "2005" @default.
- W2113007275 type Work @default.
- W2113007275 sameAs 2113007275 @default.
- W2113007275 citedByCount "1" @default.
- W2113007275 countsByYear W21130072752016 @default.
- W2113007275 crossrefType "proceedings-article" @default.
- W2113007275 hasAuthorship W2113007275A5005912180 @default.
- W2113007275 hasAuthorship W2113007275A5019982316 @default.
- W2113007275 hasAuthorship W2113007275A5022015236 @default.
- W2113007275 hasAuthorship W2113007275A5047673283 @default.
- W2113007275 hasAuthorship W2113007275A5059171292 @default.
- W2113007275 hasAuthorship W2113007275A5066088803 @default.
- W2113007275 hasAuthorship W2113007275A5070945211 @default.
- W2113007275 hasConcept C119599485 @default.
- W2113007275 hasConcept C127413603 @default.
- W2113007275 hasConcept C147789679 @default.
- W2113007275 hasConcept C160671074 @default.
- W2113007275 hasConcept C165801399 @default.
- W2113007275 hasConcept C17525397 @default.
- W2113007275 hasConcept C177950962 @default.
- W2113007275 hasConcept C178790620 @default.
- W2113007275 hasConcept C185592680 @default.
- W2113007275 hasConcept C191897082 @default.
- W2113007275 hasConcept C192562407 @default.
- W2113007275 hasConcept C2779679103 @default.
- W2113007275 hasConcept C2779851234 @default.
- W2113007275 hasConcept C2780710336 @default.
- W2113007275 hasConcept C46362747 @default.
- W2113007275 hasConcept C49040817 @default.
- W2113007275 hasConcept C52192207 @default.
- W2113007275 hasConcept C544956773 @default.
- W2113007275 hasConcept C68801617 @default.
- W2113007275 hasConceptScore W2113007275C119599485 @default.
- W2113007275 hasConceptScore W2113007275C127413603 @default.
- W2113007275 hasConceptScore W2113007275C147789679 @default.
- W2113007275 hasConceptScore W2113007275C160671074 @default.
- W2113007275 hasConceptScore W2113007275C165801399 @default.
- W2113007275 hasConceptScore W2113007275C17525397 @default.
- W2113007275 hasConceptScore W2113007275C177950962 @default.
- W2113007275 hasConceptScore W2113007275C178790620 @default.
- W2113007275 hasConceptScore W2113007275C185592680 @default.
- W2113007275 hasConceptScore W2113007275C191897082 @default.
- W2113007275 hasConceptScore W2113007275C192562407 @default.
- W2113007275 hasConceptScore W2113007275C2779679103 @default.
- W2113007275 hasConceptScore W2113007275C2779851234 @default.
- W2113007275 hasConceptScore W2113007275C2780710336 @default.
- W2113007275 hasConceptScore W2113007275C46362747 @default.
- W2113007275 hasConceptScore W2113007275C49040817 @default.
- W2113007275 hasConceptScore W2113007275C52192207 @default.
- W2113007275 hasConceptScore W2113007275C544956773 @default.
- W2113007275 hasConceptScore W2113007275C68801617 @default.
- W2113007275 hasLocation W21130072751 @default.
- W2113007275 hasOpenAccess W2113007275 @default.
- W2113007275 hasPrimaryLocation W21130072751 @default.
- W2113007275 hasRelatedWork W1481179460 @default.
- W2113007275 hasRelatedWork W1482678631 @default.
- W2113007275 hasRelatedWork W1548537332 @default.
- W2113007275 hasRelatedWork W2002703587 @default.
- W2113007275 hasRelatedWork W2363475415 @default.
- W2113007275 hasRelatedWork W2374512474 @default.
- W2113007275 hasRelatedWork W2380492223 @default.
- W2113007275 hasRelatedWork W2584455473 @default.
- W2113007275 hasRelatedWork W2586375798 @default.
- W2113007275 hasRelatedWork W3025502502 @default.
- W2113007275 isParatext "false" @default.
- W2113007275 isRetracted "false" @default.
- W2113007275 magId "2113007275" @default.
- W2113007275 workType "article" @default.