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- W2113111912 abstract "This paper reports on the fabrication and experimental results of a novel piezoresistive bridge-type accelerometer utilizing merged epitaxial lateral overgrowth (MELO) of silicon. The suspension beams of a bridge type accelerometer were realized by selective epitaxial lateral overgrowth of silicon resulting in a local silicon-on-insulator (SOI) structure, resulting in high quality low-doped single crystal epitaxial silicon. Its sensitivity was 0.287 mV/V-g, resonant frequency was 2.026 kHz, and the linearity was excellent up to 30 g." @default.
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- W2113111912 date "2002-11-19" @default.
- W2113111912 modified "2023-09-25" @default.
- W2113111912 title "Fabrication and its response characteristics of MELO accelerometer" @default.
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- W2113111912 doi "https://doi.org/10.1109/tencon.1995.496328" @default.
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