Matches in SemOpenAlex for { <https://semopenalex.org/work/W2113133771> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2113133771 abstract "We report on results achieved with three different types of polymer-coated chemical microsensors fabricated in industrial CMOS technology. The first and most extensively studied transducer is a microcapacitor sensitive to changes in dielectric properties of the polymer layer due to analyte absorption. An on-chip integrated (Sigma) (Delta) -converter allows for detecting the minute capacitance changes. The second transducer is a resonant cantilever sensitive to predominantly mass changes. The cantilever is electrothermally excited, its vibrations are detected using a piezoresistive Wheatstone bridge. In analogy to acoustic wave devices, analyte absorption in the polymer causes resonance frequency shifts as a consequent of changes in the vibrating mass. The last transducer is a microcalorimeter consisting of a polymer-coated sensing thermopile and an uncoated reference thermopile each on micromachined membranes. The measurand is the absorption or desorption heat of organic volatiles in the polymer layer. The difference between the resulting thermovoltages is processed with an on-chip low-noise differential amplifier. Enthalpy changes on the order of (mu) J have been detected." @default.
- W2113133771 created "2016-06-24" @default.
- W2113133771 creator A5000470100 @default.
- W2113133771 creator A5001983294 @default.
- W2113133771 creator A5004296312 @default.
- W2113133771 creator A5060604954 @default.
- W2113133771 creator A5067362832 @default.
- W2113133771 creator A5074091435 @default.
- W2113133771 creator A5090431260 @default.
- W2113133771 date "1999-11-18" @default.
- W2113133771 modified "2023-09-23" @default.
- W2113133771 title "<title>CMOS-based chemical microsensors: components of a micronose system</title>" @default.
- W2113133771 doi "https://doi.org/10.1117/12.370283" @default.
- W2113133771 hasPublicationYear "1999" @default.
- W2113133771 type Work @default.
- W2113133771 sameAs 2113133771 @default.
- W2113133771 citedByCount "2" @default.
- W2113133771 crossrefType "proceedings-article" @default.
- W2113133771 hasAuthorship W2113133771A5000470100 @default.
- W2113133771 hasAuthorship W2113133771A5001983294 @default.
- W2113133771 hasAuthorship W2113133771A5004296312 @default.
- W2113133771 hasAuthorship W2113133771A5060604954 @default.
- W2113133771 hasAuthorship W2113133771A5067362832 @default.
- W2113133771 hasAuthorship W2113133771A5074091435 @default.
- W2113133771 hasAuthorship W2113133771A5090431260 @default.
- W2113133771 hasConcept C10390740 @default.
- W2113133771 hasConcept C104713690 @default.
- W2113133771 hasConcept C119599485 @default.
- W2113133771 hasConcept C120665830 @default.
- W2113133771 hasConcept C121332964 @default.
- W2113133771 hasConcept C125287762 @default.
- W2113133771 hasConcept C127413603 @default.
- W2113133771 hasConcept C137488568 @default.
- W2113133771 hasConcept C141354745 @default.
- W2113133771 hasConcept C147789679 @default.
- W2113133771 hasConcept C158355884 @default.
- W2113133771 hasConcept C159985019 @default.
- W2113133771 hasConcept C165801399 @default.
- W2113133771 hasConcept C17525397 @default.
- W2113133771 hasConcept C185592680 @default.
- W2113133771 hasConcept C192562407 @default.
- W2113133771 hasConcept C194257627 @default.
- W2113133771 hasConcept C198490522 @default.
- W2113133771 hasConcept C24890656 @default.
- W2113133771 hasConcept C2777385008 @default.
- W2113133771 hasConcept C30066665 @default.
- W2113133771 hasConcept C46362747 @default.
- W2113133771 hasConcept C47279676 @default.
- W2113133771 hasConcept C49040817 @default.
- W2113133771 hasConcept C521977710 @default.
- W2113133771 hasConcept C56318395 @default.
- W2113133771 hasConceptScore W2113133771C10390740 @default.
- W2113133771 hasConceptScore W2113133771C104713690 @default.
- W2113133771 hasConceptScore W2113133771C119599485 @default.
- W2113133771 hasConceptScore W2113133771C120665830 @default.
- W2113133771 hasConceptScore W2113133771C121332964 @default.
- W2113133771 hasConceptScore W2113133771C125287762 @default.
- W2113133771 hasConceptScore W2113133771C127413603 @default.
- W2113133771 hasConceptScore W2113133771C137488568 @default.
- W2113133771 hasConceptScore W2113133771C141354745 @default.
- W2113133771 hasConceptScore W2113133771C147789679 @default.
- W2113133771 hasConceptScore W2113133771C158355884 @default.
- W2113133771 hasConceptScore W2113133771C159985019 @default.
- W2113133771 hasConceptScore W2113133771C165801399 @default.
- W2113133771 hasConceptScore W2113133771C17525397 @default.
- W2113133771 hasConceptScore W2113133771C185592680 @default.
- W2113133771 hasConceptScore W2113133771C192562407 @default.
- W2113133771 hasConceptScore W2113133771C194257627 @default.
- W2113133771 hasConceptScore W2113133771C198490522 @default.
- W2113133771 hasConceptScore W2113133771C24890656 @default.
- W2113133771 hasConceptScore W2113133771C2777385008 @default.
- W2113133771 hasConceptScore W2113133771C30066665 @default.
- W2113133771 hasConceptScore W2113133771C46362747 @default.
- W2113133771 hasConceptScore W2113133771C47279676 @default.
- W2113133771 hasConceptScore W2113133771C49040817 @default.
- W2113133771 hasConceptScore W2113133771C521977710 @default.
- W2113133771 hasConceptScore W2113133771C56318395 @default.
- W2113133771 hasLocation W21131337711 @default.
- W2113133771 hasOpenAccess W2113133771 @default.
- W2113133771 hasPrimaryLocation W21131337711 @default.
- W2113133771 hasRelatedWork W1993614538 @default.
- W2113133771 hasRelatedWork W2007149924 @default.
- W2113133771 hasRelatedWork W2034564031 @default.
- W2113133771 hasRelatedWork W2057715624 @default.
- W2113133771 hasRelatedWork W2080085392 @default.
- W2113133771 hasRelatedWork W2081793799 @default.
- W2113133771 hasRelatedWork W2092806878 @default.
- W2113133771 hasRelatedWork W2110357888 @default.
- W2113133771 hasRelatedWork W2113133771 @default.
- W2113133771 hasRelatedWork W1998975346 @default.
- W2113133771 isParatext "false" @default.
- W2113133771 isRetracted "false" @default.
- W2113133771 magId "2113133771" @default.
- W2113133771 workType "article" @default.