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- W2113145521 abstract "Micro and nanosystems are the completed devices that combine into one sensor, electronic, and mechanical parts. Realization of the mechanical interaction between nano-, micro-, and macro world is the limiting factor for such a complex system." @default.
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- W2113145521 date "2009-04-22" @default.
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- W2113145521 title "Nanostructuring technologies for reliable moveable elements" @default.
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