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- W2113232180 abstract "As the devices have faced the limit of shrinking, a lot of candidates rise to lead the next generation of device technology. One of the well-known candidates is a phase change memory (PCM) which is based on a chalcogenide material, called Ge2Sb2Te5 (GST). Principle of PCM operation is decided by changing the phase of GST thermodynamically. Thus, structures of a PCM cell such as keyhole and μ-trench are mainly used for Joule heating. However, in the process of making a trench, there is inevitably a difference between top and bottom aperture of the trench, which affects the electrical properties of PCM. In this study, we build a PCM cell structure using technology computer-aided design (TCAD) and analyze the effect of a tilted angle of the trench on the phase change memory operation." @default.
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- W2113232180 date "2014-02-27" @default.
- W2113232180 modified "2023-09-26" @default.
- W2113232180 title "Effect of Tilted Angle in Trench Structure on Phase Change Memory Operation Using TCAD Simulation" @default.
- W2113232180 doi "https://doi.org/10.1149/06001.0995ecst" @default.
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