Matches in SemOpenAlex for { <https://semopenalex.org/work/W2113233321> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2113233321 abstract "Current European development trends in IC processing technologies are reviewed. Most research projects are presently carried out in the EEC framework (IESSI-ESPRIT), which therefore acts as a trendsetter in the field of submicron processing. Major efforts are devoted to the improvement of process control at sub-0.5- mu m dimensions. Examples can be found in lithography and in the fields of rapid thermal processing (RTP), junction formation and ultraclean processing. In the area of metallization, two trends are clearly identified: the introduction of cluster tools and the shift from sputter deposition to CVD. Finally, CAD techniques are under development for improved process control in IC manufacturing. >" @default.
- W2113233321 created "2016-06-24" @default.
- W2113233321 creator A5075223907 @default.
- W2113233321 date "2003-01-02" @default.
- W2113233321 modified "2023-09-25" @default.
- W2113233321 title "Key technologies for future IC manufacturing: a view from Europe" @default.
- W2113233321 cites W2037507148 @default.
- W2113233321 cites W2049418378 @default.
- W2113233321 cites W2053244795 @default.
- W2113233321 cites W2060935134 @default.
- W2113233321 cites W2064611816 @default.
- W2113233321 cites W2071645078 @default.
- W2113233321 cites W2073941291 @default.
- W2113233321 cites W2090600167 @default.
- W2113233321 cites W2094413614 @default.
- W2113233321 cites W2103557367 @default.
- W2113233321 cites W2314103677 @default.
- W2113233321 doi "https://doi.org/10.1109/asmc.1992.253835" @default.
- W2113233321 hasPublicationYear "2003" @default.
- W2113233321 type Work @default.
- W2113233321 sameAs 2113233321 @default.
- W2113233321 citedByCount "0" @default.
- W2113233321 crossrefType "proceedings-article" @default.
- W2113233321 hasAuthorship W2113233321A5075223907 @default.
- W2113233321 hasConcept C111919701 @default.
- W2113233321 hasConcept C117671659 @default.
- W2113233321 hasConcept C127413603 @default.
- W2113233321 hasConcept C155386361 @default.
- W2113233321 hasConcept C160671074 @default.
- W2113233321 hasConcept C171250308 @default.
- W2113233321 hasConcept C19067145 @default.
- W2113233321 hasConcept C192562407 @default.
- W2113233321 hasConcept C194789388 @default.
- W2113233321 hasConcept C199639397 @default.
- W2113233321 hasConcept C201995342 @default.
- W2113233321 hasConcept C202444582 @default.
- W2113233321 hasConcept C204223013 @default.
- W2113233321 hasConcept C22423302 @default.
- W2113233321 hasConcept C26517878 @default.
- W2113233321 hasConcept C33923547 @default.
- W2113233321 hasConcept C38652104 @default.
- W2113233321 hasConcept C41008148 @default.
- W2113233321 hasConcept C49040817 @default.
- W2113233321 hasConcept C72832162 @default.
- W2113233321 hasConcept C9652623 @default.
- W2113233321 hasConcept C98045186 @default.
- W2113233321 hasConceptScore W2113233321C111919701 @default.
- W2113233321 hasConceptScore W2113233321C117671659 @default.
- W2113233321 hasConceptScore W2113233321C127413603 @default.
- W2113233321 hasConceptScore W2113233321C155386361 @default.
- W2113233321 hasConceptScore W2113233321C160671074 @default.
- W2113233321 hasConceptScore W2113233321C171250308 @default.
- W2113233321 hasConceptScore W2113233321C19067145 @default.
- W2113233321 hasConceptScore W2113233321C192562407 @default.
- W2113233321 hasConceptScore W2113233321C194789388 @default.
- W2113233321 hasConceptScore W2113233321C199639397 @default.
- W2113233321 hasConceptScore W2113233321C201995342 @default.
- W2113233321 hasConceptScore W2113233321C202444582 @default.
- W2113233321 hasConceptScore W2113233321C204223013 @default.
- W2113233321 hasConceptScore W2113233321C22423302 @default.
- W2113233321 hasConceptScore W2113233321C26517878 @default.
- W2113233321 hasConceptScore W2113233321C33923547 @default.
- W2113233321 hasConceptScore W2113233321C38652104 @default.
- W2113233321 hasConceptScore W2113233321C41008148 @default.
- W2113233321 hasConceptScore W2113233321C49040817 @default.
- W2113233321 hasConceptScore W2113233321C72832162 @default.
- W2113233321 hasConceptScore W2113233321C9652623 @default.
- W2113233321 hasConceptScore W2113233321C98045186 @default.
- W2113233321 hasLocation W21132333211 @default.
- W2113233321 hasOpenAccess W2113233321 @default.
- W2113233321 hasPrimaryLocation W21132333211 @default.
- W2113233321 hasRelatedWork W1513117469 @default.
- W2113233321 hasRelatedWork W1611562344 @default.
- W2113233321 hasRelatedWork W1628130862 @default.
- W2113233321 hasRelatedWork W1882084300 @default.
- W2113233321 hasRelatedWork W1970198274 @default.
- W2113233321 hasRelatedWork W1973546670 @default.
- W2113233321 hasRelatedWork W1975930848 @default.
- W2113233321 hasRelatedWork W1984504690 @default.
- W2113233321 hasRelatedWork W1994643389 @default.
- W2113233321 hasRelatedWork W1996926877 @default.
- W2113233321 hasRelatedWork W2061695125 @default.
- W2113233321 hasRelatedWork W2107550485 @default.
- W2113233321 hasRelatedWork W2112682557 @default.
- W2113233321 hasRelatedWork W2118011781 @default.
- W2113233321 hasRelatedWork W2134906221 @default.
- W2113233321 hasRelatedWork W2294857237 @default.
- W2113233321 hasRelatedWork W2307758300 @default.
- W2113233321 hasRelatedWork W2549906950 @default.
- W2113233321 hasRelatedWork W2094615758 @default.
- W2113233321 hasRelatedWork W2740372134 @default.
- W2113233321 isParatext "false" @default.
- W2113233321 isRetracted "false" @default.
- W2113233321 magId "2113233321" @default.
- W2113233321 workType "article" @default.