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- W2113244841 abstract "The enhanced oxidation of Cu on Ru/diffusion barriers was observed. The in-situ X-ray diffraction results reveal that the Cu oxidation can be inhibited by doping C in either Ru adhesion layer or TaN barrier layer. The RuC/barrier becomes more robust with certain amount of C doped in Ru. ALD Cu <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> O on the RuC substrate was carried out and the effect of C on reduction of Cu oxide was observed." @default.
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- W2113244841 date "2010-06-01" @default.
- W2113244841 modified "2023-10-02" @default.
- W2113244841 title "Inhibition of enhanced Cu oxidation on ruthenium" @default.
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- W2113244841 doi "https://doi.org/10.1109/iitc.2010.5510315" @default.
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