Matches in SemOpenAlex for { <https://semopenalex.org/work/W2113248973> ?p ?o ?g. }
- W2113248973 endingPage "469" @default.
- W2113248973 startingPage "462" @default.
- W2113248973 abstract "We demonstrate a mass-production-amenable technology for fabrication, surface modification and multifunction integration in polymeric microfluidic devices, namely direct lithography on the polymeric substrate followed by polymer plasma etching, and selective plasma deposition. We apply the plasma processing technology to fabricate polymeric microfluidics in poly(methyl methacrylate) (PMMA) and poly(ether ether ketone) (PEEK). First, deep anisotropic O2 plasma etching is utilized to pattern the polymer via an in situ, highly etch-resistant, thin, Si-containing photoresist, or via a thick organic photoresist. Absolute control of surface roughness (from smooth to very rough), and the production of stable-in-time (slowly ageing) superhydrophilic microchannels are demonstrated. Second, we demonstrate the spontaneous capillary pumping through such rough, superhydrophilic plasma-etched microchannels in contrast to smooth ones, even 5 weeks after fabrication. Third, by using C4F8 fluorocarbon plasma deposition through a stencil mask, we produce superhydrophobic patches inside the microchannels, and use them as passive valves. Our approach proposes “smart” multifunctional microfluidics fabricated by a plasma technology toolbox." @default.
- W2113248973 created "2016-06-24" @default.
- W2113248973 creator A5027339378 @default.
- W2113248973 creator A5031370399 @default.
- W2113248973 creator A5078451590 @default.
- W2113248973 creator A5081192294 @default.
- W2113248973 date "2010-01-01" @default.
- W2113248973 modified "2023-10-11" @default.
- W2113248973 title "“Smart” polymeric microfluidics fabricated by plasma processing: controlled wetting, capillary filling and hydrophobic valving" @default.
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- W2113248973 cites W1968953467 @default.
- W2113248973 cites W1969140645 @default.
- W2113248973 cites W1970716811 @default.
- W2113248973 cites W1973404063 @default.
- W2113248973 cites W1975140804 @default.
- W2113248973 cites W1985644826 @default.
- W2113248973 cites W1996905907 @default.
- W2113248973 cites W2008255288 @default.
- W2113248973 cites W2018386890 @default.
- W2113248973 cites W2022131222 @default.
- W2113248973 cites W2028728189 @default.
- W2113248973 cites W2028956715 @default.
- W2113248973 cites W2029373998 @default.
- W2113248973 cites W2034263032 @default.
- W2113248973 cites W2034911367 @default.
- W2113248973 cites W2036615469 @default.
- W2113248973 cites W2037413469 @default.
- W2113248973 cites W2041474127 @default.
- W2113248973 cites W2043283626 @default.
- W2113248973 cites W2048115881 @default.
- W2113248973 cites W2051204826 @default.
- W2113248973 cites W2052155987 @default.
- W2113248973 cites W2066745019 @default.
- W2113248973 cites W2067407588 @default.
- W2113248973 cites W2068939260 @default.
- W2113248973 cites W2069050728 @default.
- W2113248973 cites W2074557966 @default.
- W2113248973 cites W2085817796 @default.
- W2113248973 cites W2090019065 @default.
- W2113248973 cites W2091078113 @default.
- W2113248973 cites W2100325468 @default.
- W2113248973 cites W2113033588 @default.
- W2113248973 cites W2113308442 @default.
- W2113248973 cites W2114581088 @default.
- W2113248973 cites W2123527983 @default.
- W2113248973 cites W2127538459 @default.
- W2113248973 cites W2131896433 @default.
- W2113248973 cites W2144257274 @default.
- W2113248973 cites W2152123134 @default.
- W2113248973 cites W2152838132 @default.
- W2113248973 cites W2153323887 @default.
- W2113248973 doi "https://doi.org/10.1039/b916566e" @default.
- W2113248973 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/20126686" @default.
- W2113248973 hasPublicationYear "2010" @default.
- W2113248973 type Work @default.
- W2113248973 sameAs 2113248973 @default.
- W2113248973 citedByCount "159" @default.
- W2113248973 countsByYear W21132489732012 @default.
- W2113248973 countsByYear W21132489732013 @default.
- W2113248973 countsByYear W21132489732014 @default.
- W2113248973 countsByYear W21132489732015 @default.
- W2113248973 countsByYear W21132489732016 @default.
- W2113248973 countsByYear W21132489732017 @default.
- W2113248973 countsByYear W21132489732018 @default.
- W2113248973 countsByYear W21132489732019 @default.
- W2113248973 countsByYear W21132489732020 @default.
- W2113248973 countsByYear W21132489732021 @default.
- W2113248973 countsByYear W21132489732022 @default.
- W2113248973 countsByYear W21132489732023 @default.
- W2113248973 crossrefType "journal-article" @default.
- W2113248973 hasAuthorship W2113248973A5027339378 @default.
- W2113248973 hasAuthorship W2113248973A5031370399 @default.
- W2113248973 hasAuthorship W2113248973A5078451590 @default.
- W2113248973 hasAuthorship W2113248973A5081192294 @default.
- W2113248973 hasConcept C100460472 @default.
- W2113248973 hasConcept C107187091 @default.
- W2113248973 hasConcept C118039452 @default.
- W2113248973 hasConcept C121332964 @default.
- W2113248973 hasConcept C134406635 @default.
- W2113248973 hasConcept C134514944 @default.
- W2113248973 hasConcept C136525101 @default.
- W2113248973 hasConcept C142724271 @default.
- W2113248973 hasConcept C145738678 @default.
- W2113248973 hasConcept C159985019 @default.
- W2113248973 hasConcept C171250308 @default.
- W2113248973 hasConcept C192562407 @default.
- W2113248973 hasConcept C204787440 @default.
- W2113248973 hasConcept C2779227376 @default.
- W2113248973 hasConcept C521977710 @default.
- W2113248973 hasConcept C62520636 @default.
- W2113248973 hasConcept C6556556 @default.
- W2113248973 hasConcept C71924100 @default.
- W2113248973 hasConcept C82706917 @default.
- W2113248973 hasConcept C8673954 @default.
- W2113248973 hasConceptScore W2113248973C100460472 @default.
- W2113248973 hasConceptScore W2113248973C107187091 @default.
- W2113248973 hasConceptScore W2113248973C118039452 @default.
- W2113248973 hasConceptScore W2113248973C121332964 @default.