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- W2113257222 abstract "The implementation of control circuitry is presented for a multielement mass flow sensor capable of simultaneously measuring five different gas-related parameters necessary for mass flow. A process has been developed to merge the micromachined sensing structures and the CMOS readout circuitry on a single chip. The total process requires thirteen masks: eight for the double-poly, single-metal CMOS process and five for additional processing of the transducer elements. The on-chip circuitry includes offset-free instrumentation amplifiers, an analog multiplexer, heater drive circuits, self-test circuitry and a bandgap temperature sensor using substrate n-p-n bipolar transistors. The resulting multielement chip requires only ten external pins and delivers high-level buffered output signals describing gas velocity, type, direction, pressure and temperature.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
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- W2113257222 date "1990-01-01" @default.
- W2113257222 modified "2023-10-13" @default.
- W2113257222 title "A multi-element monolithic mass flowmeter with on-chip CMOS readout electronics" @default.
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- W2113257222 doi "https://doi.org/10.1109/solsen.1990.109844" @default.
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