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- W2113347610 abstract "A new type of high-force, large-displacement, low-voltage piezoelectric actuator has been developed using a compact stroke amplifying mechanism. The device is fabricated using an SU-8 structure as an amplifying mechanism for thin-film PZT. Each actuator cell can be arrayed in series and/or in parallel and the design can accommodate different force/displacement requirements. Peak static force of the design tested was 55 /spl mu/N, and peak static displacement was 1.18 /spl mu/m at 10 V. Fabricated devices consisting of three actuators in series were tested, which showed a strain amplification ratio in excess of 10:1 per cell." @default.
- W2113347610 created "2016-06-24" @default.
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- W2113347610 date "2004-08-02" @default.
- W2113347610 modified "2023-09-25" @default.
- W2113347610 title "Large-strain, piezoelectric, in-plane micro-actuator" @default.
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- W2113347610 doi "https://doi.org/10.1109/mems.2004.1290620" @default.
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