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- W2113384256 abstract "In this paper, we present a novel electrical test structure for determining the thermal expansion coefficients (TECs) of micromachined polysilicon thin films. The electrothermal properties of the test structure are analyzed. The pull-in method is exploited in characterizing TECs of thin films. In addition, an analytical model and a measurement method are developed. The finite element software ANSYS is used to support the electrothermal analytical model. The test structure is fabricated using standard surface micromachining technology, and it is characterized under the natural operation environment. Measured average value of TEC is 2.48 × 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-6</sup> K <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-1</sup> from 300 K to 364.8K." @default.
- W2113384256 created "2016-06-24" @default.
- W2113384256 creator A5015516635 @default.
- W2113384256 creator A5025732097 @default.
- W2113384256 creator A5038334345 @default.
- W2113384256 date "2010-11-01" @default.
- W2113384256 modified "2023-10-16" @default.
- W2113384256 title "An electrical probe for measuring thermal expansion coefficients of micromachined polysilicon thin films" @default.
- W2113384256 cites W1983543981 @default.
- W2113384256 cites W2046587606 @default.
- W2113384256 cites W2060295799 @default.
- W2113384256 cites W2076287172 @default.
- W2113384256 cites W2097767495 @default.
- W2113384256 cites W2135399685 @default.
- W2113384256 cites W2137349390 @default.
- W2113384256 cites W2148471671 @default.
- W2113384256 doi "https://doi.org/10.1109/icsens.2010.5690482" @default.
- W2113384256 hasPublicationYear "2010" @default.
- W2113384256 type Work @default.
- W2113384256 sameAs 2113384256 @default.
- W2113384256 citedByCount "0" @default.
- W2113384256 crossrefType "proceedings-article" @default.
- W2113384256 hasAuthorship W2113384256A5015516635 @default.
- W2113384256 hasAuthorship W2113384256A5025732097 @default.
- W2113384256 hasAuthorship W2113384256A5038334345 @default.
- W2113384256 hasConcept C113196181 @default.
- W2113384256 hasConcept C121332964 @default.
- W2113384256 hasConcept C127413603 @default.
- W2113384256 hasConcept C135628077 @default.
- W2113384256 hasConcept C136525101 @default.
- W2113384256 hasConcept C142724271 @default.
- W2113384256 hasConcept C145667562 @default.
- W2113384256 hasConcept C159985019 @default.
- W2113384256 hasConcept C171250308 @default.
- W2113384256 hasConcept C185592680 @default.
- W2113384256 hasConcept C19067145 @default.
- W2113384256 hasConcept C192562407 @default.
- W2113384256 hasConcept C204530211 @default.
- W2113384256 hasConcept C204787440 @default.
- W2113384256 hasConcept C24326235 @default.
- W2113384256 hasConcept C41008148 @default.
- W2113384256 hasConcept C43617362 @default.
- W2113384256 hasConcept C47463417 @default.
- W2113384256 hasConcept C49040817 @default.
- W2113384256 hasConcept C544956773 @default.
- W2113384256 hasConcept C66938386 @default.
- W2113384256 hasConcept C71924100 @default.
- W2113384256 hasConcept C78519656 @default.
- W2113384256 hasConcept C97355855 @default.
- W2113384256 hasConceptScore W2113384256C113196181 @default.
- W2113384256 hasConceptScore W2113384256C121332964 @default.
- W2113384256 hasConceptScore W2113384256C127413603 @default.
- W2113384256 hasConceptScore W2113384256C135628077 @default.
- W2113384256 hasConceptScore W2113384256C136525101 @default.
- W2113384256 hasConceptScore W2113384256C142724271 @default.
- W2113384256 hasConceptScore W2113384256C145667562 @default.
- W2113384256 hasConceptScore W2113384256C159985019 @default.
- W2113384256 hasConceptScore W2113384256C171250308 @default.
- W2113384256 hasConceptScore W2113384256C185592680 @default.
- W2113384256 hasConceptScore W2113384256C19067145 @default.
- W2113384256 hasConceptScore W2113384256C192562407 @default.
- W2113384256 hasConceptScore W2113384256C204530211 @default.
- W2113384256 hasConceptScore W2113384256C204787440 @default.
- W2113384256 hasConceptScore W2113384256C24326235 @default.
- W2113384256 hasConceptScore W2113384256C41008148 @default.
- W2113384256 hasConceptScore W2113384256C43617362 @default.
- W2113384256 hasConceptScore W2113384256C47463417 @default.
- W2113384256 hasConceptScore W2113384256C49040817 @default.
- W2113384256 hasConceptScore W2113384256C544956773 @default.
- W2113384256 hasConceptScore W2113384256C66938386 @default.
- W2113384256 hasConceptScore W2113384256C71924100 @default.
- W2113384256 hasConceptScore W2113384256C78519656 @default.
- W2113384256 hasConceptScore W2113384256C97355855 @default.
- W2113384256 hasLocation W21133842561 @default.
- W2113384256 hasOpenAccess W2113384256 @default.
- W2113384256 hasPrimaryLocation W21133842561 @default.
- W2113384256 hasRelatedWork W1973355215 @default.
- W2113384256 hasRelatedWork W1976989494 @default.
- W2113384256 hasRelatedWork W2001020614 @default.
- W2113384256 hasRelatedWork W2077789538 @default.
- W2113384256 hasRelatedWork W2114310119 @default.
- W2113384256 hasRelatedWork W2163114291 @default.
- W2113384256 hasRelatedWork W2899084033 @default.
- W2113384256 hasRelatedWork W3038431068 @default.
- W2113384256 hasRelatedWork W3197827877 @default.
- W2113384256 hasRelatedWork W4223522124 @default.
- W2113384256 isParatext "false" @default.
- W2113384256 isRetracted "false" @default.
- W2113384256 magId "2113384256" @default.
- W2113384256 workType "article" @default.