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- W2113399384 abstract "In this paper a new low cost design is presented. The moving element of the probe head consists of the stylus fixed to a diaphragma flexure, made of berillium-copper foil with, a small aluminium enhanced mirrors at the center. The displacement of the probe tip is determineed from the displacement and the rotations of the mirrors measured by a modified optical pick-up and by two lasers focused on four quadrant diodes. In order to test probes a calibration system with ∼40 nm measuring uncertainty was designed. A high precision three-axis translation stage, with a working range of 100 × 100 × 100 µm, moves the probe stylus and the position of the stage is determined by three mutually-orthogonal plane mirror laser interferometer transducers having 1 nm resolution." @default.
- W2113399384 created "2016-06-24" @default.
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- W2113399384 date "2009-05-01" @default.
- W2113399384 modified "2023-09-23" @default.
- W2113399384 title "A low cost submicron measuring probe" @default.
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- W2113399384 doi "https://doi.org/10.1109/saci.2009.5136246" @default.
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