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- W2113458942 abstract "We review definitions of optical resolution and how they relate to the Instrument Transfer Function of surface profiling interferometers. The corresponding optical cutoff provides a selection criterion for a given metrology application (PSD, waviness)." @default.
- W2113458942 created "2016-06-24" @default.
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- W2113458942 date "2012-01-01" @default.
- W2113458942 modified "2023-10-18" @default.
- W2113458942 title "Lateral resolution and instrument transfer function as criteria for selecting surface metrology instruments" @default.
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- W2113458942 doi "https://doi.org/10.1364/oft.2012.otu1d.4" @default.
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