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• W2113554356 abstract "Abstract In this study, we have fabricated nano-scaled oxide structures on GaAs substrates that are doped in different conductivity types of p- and n-types and plane orientations of GaAs(100) and GaAs(711), respectively, using an atomic force microscopy (AFM) tip-induced local oxidation method. The AFM-induced GaAs oxide patterns were obtained by varying applied bias from approximately 5 V to approximately 15 V and the tip loading forces from 60 to 180 nN. During the local oxidation, the humidity and the tip scan speed are fixed to approximately 45% and approximately 6.3 μm/s, respectively. The local oxidation rate is further improved in p-type GaAs compared to n-type GaAs substrates whereas the rate is enhanced in GaAs(100) compared to and GaAs(711), respectively, under the identical conditions. In addition, the oxide formation mechanisms in different doping types and plane orientations were investigated and compared with two-dimensional simulation results." @default.
• W2113554356 created "2016-06-24" @default.
• W2113554356 creator A5053922127 @default.
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• W2113554356 date "2011-10-06" @default.
• W2113554356 modified "2023-10-16" @default.
• W2113554356 title "Nano-structure fabrication of GaAs using AFM tip-induced local oxidation method: different doping types and plane orientations" @default.
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• W2113554356 doi "https://doi.org/10.1186/1556-276x-6-550" @default.
• W2113554356 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/3212088" @default.
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