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- W2113572480 abstract "It is shown that the thickness of the silicon and oxide layers of a silicon-on-insulator (SOI) structure can be determined from high-frequency capacitance-voltage measurements. The test device consists of a Schottky diode in series with a Si-oxide-Si capacitor. The Si film and the substrate are n-type. The operation of this device is explained for n-type Si with the help of the energy-band diagrams. It is demonstrated that this simple test device can be implemented as a process monitor for silicon thickness control.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
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- W2113572480 date "1991-08-01" @default.
- W2113572480 modified "2023-09-26" @default.
- W2113572480 title "A simple electrical method to determine the Si and oxide thicknesses in SOI materials" @default.
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- W2113572480 doi "https://doi.org/10.1109/55.119154" @default.
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