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- W2113642966 abstract "In this paper, packaging of a Microelectromechanical System (MEMS)-based fiber optical switch was implemented along with the investigation on the related packaging techniques. A subpackage was formed as the first level encapsulation to house the MEMS chip. The results from fiber coupling test indicate a good alignment accuracy aided by the combination of rectangular shape fiber groove and fiber stopper. The packaging quality was evaluated through tensile test and cross section analysis." @default.
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- W2113642966 date "2003-08-27" @default.
- W2113642966 modified "2023-09-22" @default.
- W2113642966 title "Packaging of a fiber optical MEMS switch" @default.
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- W2113642966 doi "https://doi.org/10.1109/eptc.2002.1185605" @default.
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