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- W2113783296 abstract "Rigorous coupled wave analysis (RCWA) interprets 3D white-light interference microscopy profiles and reveals the dimensions of optically-unresolved surface features. Measurements of silicon etch depth of a 450-nm pitch grating structure correlate to atomic force microscopy with R(2)= 0.995 and a repeatability of 0.11nm. This same technique achieves a <1nm sensitivity to 80-nm lateral widths of 190-nm pitch gratings using a 570-nm mean wavelength." @default.
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- W2113783296 date "2008-03-10" @default.
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- W2113783296 title "Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling" @default.
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- W2113783296 doi "https://doi.org/10.1364/oe.16.003970" @default.
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