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- W2113827316 abstract "A CMOS compatible super junction LDMOST (SJ-LDMOST) structure, which reduces substrate-assisted depletion effects, is reported. The proposed structure uses a N-buffer layer between the pillars and the P-substrate to achieve charge compensation between the pillars, the N-buffer layer and the P-substrate. The new structure features high breakdown voltage, low on resistance, excellent gate charge characteristics and reduced sensitivity to doping imbalance in the pillars." @default.
- W2113827316 created "2016-06-24" @default.
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- W2113827316 date "2005-07-27" @default.
- W2113827316 modified "2023-09-25" @default.
- W2113827316 title "CMOS Compatible Super Junction LDMOST with N-Buffer Layer" @default.
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- W2113827316 doi "https://doi.org/10.1109/ispsd.2005.1487976" @default.
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