FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2114017508> ?p ?o ?g. }

• W2114017508 endingPage "864" @default.
• W2114017508 startingPage "857" @default.
• W2114017508 abstract "This study focused on the fabrication and the theoretical analysis of solidly mounted resonators (SMR) concerning dual-mode frequency responses and their frequency shift of bulk acoustic wave (BAW) resonance. For this device fabrication, RF/DC magnetron sputtering and photolithography were employed to constitute the required multilayer structure. For the theoretical analysis, the dualmode frequency shift was characterized by the Sauerbrey's formula, and a modified formula was carried out following the trend for the large frequency shift. In the fabrication of the SMR device, Mo/SiO2 was chosen to construct the Bragg reflector as the high/low acoustic impedance materials, respectively, and aluminum nitride (AlN) was used as a piezoelectric layer. To investigate the characteristics of BAW on the dual-mode frequency shift, the c-axis tilted angle of AlN was altered as well as the various mass loading on the SMR. Based on the experimental results, the dual-resonance frequencies showed a nonlinear decreasing trend with a linear increase of the mass loading. Therefore, a modified formula was carried out. Furthermore, the ratio of the longitudinal-resonant frequency to the shear-resonant frequency remained at a range around 1.76 despite the various c-axis tilted angles of AlN and gradual mass loading on the SMR. The electromechanical coupling coefficient, k2(eff), of the shear resonance rose with the increase of the c-axis tilted angle of AlN." @default.
• W2114017508 created "2016-06-24" @default.
• W2114017508 creator A5026076013 @default.
• W2114017508 creator A5040012420 @default.
• W2114017508 creator A5048337197 @default.
• W2114017508 creator A5085523374 @default.
• W2114017508 date "2008-04-01" @default.
• W2114017508 modified "2023-10-18" @default.
• W2114017508 title "Synthesis and bulk acoustic wave properties on the dual mode frequency shift of solidly mounted resonators" @default.
• W2114017508 cites W1491464745 @default.
• W2114017508 cites W1963644382 @default.
• W2114017508 cites W1978280489 @default.
• W2114017508 cites W1980318265 @default.
• W2114017508 cites W1981966175 @default.
• W2114017508 cites W1999142571 @default.
• W2114017508 cites W2009802385 @default.
• W2114017508 cites W2018881848 @default.
• W2114017508 cites W2024554676 @default.
• W2114017508 cites W2075174131 @default.
• W2114017508 cites W2083505366 @default.
• W2114017508 cites W2103118422 @default.
• W2114017508 cites W2104545383 @default.
• W2114017508 cites W2112349959 @default.
• W2114017508 cites W2112838720 @default.
• W2114017508 cites W2119181228 @default.
• W2114017508 cites W2127076004 @default.
• W2114017508 cites W2144811296 @default.
• W2114017508 cites W2145628973 @default.
• W2114017508 cites W2146876624 @default.
• W2114017508 cites W2152579453 @default.
• W2114017508 cites W2156520480 @default.
• W2114017508 cites W2167357466 @default.
• W2114017508 cites W2167920948 @default.
• W2114017508 cites W2548527777 @default.
• W2114017508 cites W2599199563 @default.
• W2114017508 cites W3217742010 @default.
• W2114017508 doi "https://doi.org/10.1109/tuffc.2008.720" @default.
• W2114017508 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/18467230" @default.
• W2114017508 hasPublicationYear "2008" @default.
• W2114017508 type Work @default.
• W2114017508 sameAs 2114017508 @default.
• W2114017508 citedByCount "20" @default.
• W2114017508 countsByYear W21140175082012 @default.
• W2114017508 countsByYear W21140175082014 @default.
• W2114017508 countsByYear W21140175082015 @default.
• W2114017508 countsByYear W21140175082016 @default.
• W2114017508 countsByYear W21140175082017 @default.
• W2114017508 countsByYear W21140175082021 @default.
• W2114017508 countsByYear W21140175082022 @default.
• W2114017508 crossrefType "journal-article" @default.
• W2114017508 hasAuthorship W2114017508A5026076013 @default.
• W2114017508 hasAuthorship W2114017508A5040012420 @default.
• W2114017508 hasAuthorship W2114017508A5048337197 @default.
• W2114017508 hasAuthorship W2114017508A5085523374 @default.
• W2114017508 hasConcept C100082104 @default.
• W2114017508 hasConcept C120665830 @default.
• W2114017508 hasConcept C121332964 @default.
• W2114017508 hasConcept C136525101 @default.
• W2114017508 hasConcept C139210041 @default.
• W2114017508 hasConcept C142724271 @default.
• W2114017508 hasConcept C159985019 @default.
• W2114017508 hasConcept C184779094 @default.
• W2114017508 hasConcept C192562407 @default.
• W2114017508 hasConcept C204787440 @default.
• W2114017508 hasConcept C24890656 @default.
• W2114017508 hasConcept C49040817 @default.
• W2114017508 hasConcept C71924100 @default.
• W2114017508 hasConcept C86194701 @default.
• W2114017508 hasConcept C91397564 @default.
• W2114017508 hasConcept C97126364 @default.
• W2114017508 hasConceptScore W2114017508C100082104 @default.
• W2114017508 hasConceptScore W2114017508C120665830 @default.
• W2114017508 hasConceptScore W2114017508C121332964 @default.
• W2114017508 hasConceptScore W2114017508C136525101 @default.
• W2114017508 hasConceptScore W2114017508C139210041 @default.
• W2114017508 hasConceptScore W2114017508C142724271 @default.
• W2114017508 hasConceptScore W2114017508C159985019 @default.
• W2114017508 hasConceptScore W2114017508C184779094 @default.
• W2114017508 hasConceptScore W2114017508C192562407 @default.
• W2114017508 hasConceptScore W2114017508C204787440 @default.
• W2114017508 hasConceptScore W2114017508C24890656 @default.
• W2114017508 hasConceptScore W2114017508C49040817 @default.
• W2114017508 hasConceptScore W2114017508C71924100 @default.
• W2114017508 hasConceptScore W2114017508C86194701 @default.
• W2114017508 hasConceptScore W2114017508C91397564 @default.
• W2114017508 hasConceptScore W2114017508C97126364 @default.
• W2114017508 hasIssue "4" @default.
• W2114017508 hasLocation W21140175081 @default.
• W2114017508 hasLocation W21140175082 @default.
• W2114017508 hasOpenAccess W2114017508 @default.
• W2114017508 hasPrimaryLocation W21140175081 @default.
• W2114017508 hasRelatedWork W1976962402 @default.
• W2114017508 hasRelatedWork W2030471483 @default.
• W2114017508 hasRelatedWork W2085569989 @default.
• W2114017508 hasRelatedWork W2110676138 @default.
• W2114017508 hasRelatedWork W2120144599 @default.
• W2114017508 hasRelatedWork W2165724298 @default.
• W2114017508 hasRelatedWork W2389608977 @default.

• next