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• W2114078139 abstract "Optical microcavities confine light to small model volumes and have ultrahigh quality factor (Q), especially microtoroid cavities, having very broad application prospects. In this paper, a micro-optical-electro-mechanical system (MOEMS) gyroscope was developed taking a new optical microcavity-planar microdisk cavity as the core sensing element. To obtain resonance curve, a resonant cavity proof-of-principle experiment was performed. As the light source and planar microdisk cavity dimensions have a decisive influence on the Q value of microcavity and angular rate measurement limit of gyroscope, a method was discussed that using traditional F-P cavity resonance curve for optimization of planar microdisk cavity geometric parameters." @default.
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• W2114078139 date "2011-02-01" @default.
• W2114078139 modified "2023-10-17" @default.
• W2114078139 title "The research of a novel gyroscope based on high Q micro-resonator" @default.
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• W2114078139 doi "https://doi.org/10.1109/nems.2011.6017556" @default.
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