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• W2114191566 abstract "Abstract This article reviews selected topics representative of advancements in the optical measurement of shape, texture, geometric dimensions, and position of objects, with applications ranging from stage metrology to surface texture analysis. The unifying theme of this update is the confluence of two technology trends – (1) rapidly advancing component technology, enabling high performance and new techniques and (2) expanding investment in advanced metrology for high value‐added products from consumer electronics to precision‐engineered components." @default.
• W2114191566 created "2016-06-24" @default.
• W2114191566 creator A5028663009 @default.
• W2114191566 date "2015-09-20" @default.
• W2114191566 modified "2023-10-12" @default.
• W2114191566 title "Advances in Optical Metrology" @default.
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• W2114191566 doi "https://doi.org/10.1002/9783527600441.oe065.pub2" @default.
• W2114191566 hasPublicationYear "2015" @default.
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