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- W2114351385 abstract "An out-of-plane micro thermal polymer actuator, which is designed with the bimorph effect, is presented. This actuator has a bi-layer structure, which consists of SU-8 photoresist encapsulating meandering nickel heater and passive Ni top layer. The actuator has a symmetric configuration. This paper demonstrates its design, simulation, fabrication and device tests. This actuator bends vertically when energized. With a size of 0.38 mm times 0.23 mm, it demonstrated a maximal vertical displacement of 24 mum at 1.4 V driving voltage and at 20 mW input power, at an average temperature of 95degC. The stiffness of the actuator is of 36 N/m along perpendicular direction, and it can generate a vertical force of 0.98 mN in this direction." @default.
- W2114351385 created "2016-06-24" @default.
- W2114351385 creator A5010921118 @default.
- W2114351385 creator A5035927704 @default.
- W2114351385 creator A5055923696 @default.
- W2114351385 creator A5086559201 @default.
- W2114351385 date "2008-01-01" @default.
- W2114351385 modified "2023-09-25" @default.
- W2114351385 title "An out-of-plane electro-thermal polymer actuator" @default.
- W2114351385 cites W1986088252 @default.
- W2114351385 cites W2084661802 @default.
- W2114351385 cites W2092431513 @default.
- W2114351385 cites W2101243746 @default.
- W2114351385 cites W2113272583 @default.
- W2114351385 cites W2158675830 @default.
- W2114351385 doi "https://doi.org/10.1109/nems.2008.4484414" @default.
- W2114351385 hasPublicationYear "2008" @default.
- W2114351385 type Work @default.
- W2114351385 sameAs 2114351385 @default.
- W2114351385 citedByCount "3" @default.
- W2114351385 countsByYear W21143513852013 @default.
- W2114351385 crossrefType "proceedings-article" @default.
- W2114351385 hasAuthorship W2114351385A5010921118 @default.
- W2114351385 hasAuthorship W2114351385A5035927704 @default.
- W2114351385 hasAuthorship W2114351385A5055923696 @default.
- W2114351385 hasAuthorship W2114351385A5086559201 @default.
- W2114351385 hasConcept C107551265 @default.
- W2114351385 hasConcept C119599485 @default.
- W2114351385 hasConcept C121332964 @default.
- W2114351385 hasConcept C127413603 @default.
- W2114351385 hasConcept C134406635 @default.
- W2114351385 hasConcept C136525101 @default.
- W2114351385 hasConcept C142724271 @default.
- W2114351385 hasConcept C153294291 @default.
- W2114351385 hasConcept C15744967 @default.
- W2114351385 hasConcept C159985019 @default.
- W2114351385 hasConcept C165801399 @default.
- W2114351385 hasConcept C172707124 @default.
- W2114351385 hasConcept C192562407 @default.
- W2114351385 hasConcept C199631012 @default.
- W2114351385 hasConcept C204530211 @default.
- W2114351385 hasConcept C204787440 @default.
- W2114351385 hasConcept C2524010 @default.
- W2114351385 hasConcept C2778393539 @default.
- W2114351385 hasConcept C2779227376 @default.
- W2114351385 hasConcept C33923547 @default.
- W2114351385 hasConcept C49040817 @default.
- W2114351385 hasConcept C542102704 @default.
- W2114351385 hasConcept C71924100 @default.
- W2114351385 hasConceptScore W2114351385C107551265 @default.
- W2114351385 hasConceptScore W2114351385C119599485 @default.
- W2114351385 hasConceptScore W2114351385C121332964 @default.
- W2114351385 hasConceptScore W2114351385C127413603 @default.
- W2114351385 hasConceptScore W2114351385C134406635 @default.
- W2114351385 hasConceptScore W2114351385C136525101 @default.
- W2114351385 hasConceptScore W2114351385C142724271 @default.
- W2114351385 hasConceptScore W2114351385C153294291 @default.
- W2114351385 hasConceptScore W2114351385C15744967 @default.
- W2114351385 hasConceptScore W2114351385C159985019 @default.
- W2114351385 hasConceptScore W2114351385C165801399 @default.
- W2114351385 hasConceptScore W2114351385C172707124 @default.
- W2114351385 hasConceptScore W2114351385C192562407 @default.
- W2114351385 hasConceptScore W2114351385C199631012 @default.
- W2114351385 hasConceptScore W2114351385C204530211 @default.
- W2114351385 hasConceptScore W2114351385C204787440 @default.
- W2114351385 hasConceptScore W2114351385C2524010 @default.
- W2114351385 hasConceptScore W2114351385C2778393539 @default.
- W2114351385 hasConceptScore W2114351385C2779227376 @default.
- W2114351385 hasConceptScore W2114351385C33923547 @default.
- W2114351385 hasConceptScore W2114351385C49040817 @default.
- W2114351385 hasConceptScore W2114351385C542102704 @default.
- W2114351385 hasConceptScore W2114351385C71924100 @default.
- W2114351385 hasLocation W21143513851 @default.
- W2114351385 hasOpenAccess W2114351385 @default.
- W2114351385 hasPrimaryLocation W21143513851 @default.
- W2114351385 hasRelatedWork W1570413962 @default.
- W2114351385 hasRelatedWork W2003894099 @default.
- W2114351385 hasRelatedWork W2007615843 @default.
- W2114351385 hasRelatedWork W2101723866 @default.
- W2114351385 hasRelatedWork W2139871202 @default.
- W2114351385 hasRelatedWork W2153342997 @default.
- W2114351385 hasRelatedWork W2159372553 @default.
- W2114351385 hasRelatedWork W2169790204 @default.
- W2114351385 hasRelatedWork W2680312837 @default.
- W2114351385 hasRelatedWork W3205536767 @default.
- W2114351385 isParatext "false" @default.
- W2114351385 isRetracted "false" @default.
- W2114351385 magId "2114351385" @default.
- W2114351385 workType "article" @default.