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- W2114366814 abstract "Simple and accurate vibration sensor using an interferometer with phase-modulated light is demonstrated. The measurement error is experimentally evaluated. The displacement measurement of a PZT mirror vibrating at 75 kHz is compared with conventional methods." @default.
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- W2114366814 date "2013-06-01" @default.
- W2114366814 modified "2023-09-24" @default.
- W2114366814 title "Experimental evaluation of vibration sensor based on interferometer with phase modulated light" @default.
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- W2114366814 doi "https://doi.org/10.1109/cleopr.2013.6600329" @default.
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