Matches in SemOpenAlex for { <https://semopenalex.org/work/W2114535268> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2114535268 endingPage "67" @default.
- W2114535268 startingPage "48" @default.
- W2114535268 abstract "Shuffle motors are electrostatic stepper micromotors that employ a built-in mechanical leverage to produce large output forces as well as high resolution displacements. These motors can generally move only over predefined paths that served as driving electrodes. Here, we present the design, modeling and experimental characterization of a novel shuffle motor that moves over an unpatterned, electrically grounded surface. By combining the novel design with an innovative micromachining method based on vertical trench isolation, we have greatly simplified the fabrication of the shuffle motors and significantly improved their overall performance characteristics and reliability. Depending on the propulsion voltage, our motor with external dimensions of 290 μm × 410 mm displays two distinct operational modes with adjustable step sizes varying respectively from 0.6 to 7 nm and from 49 to 62 nm. The prototype was driven up to a cycling frequency of 80 kHz, showing nearly linear dependence of its velocity with frequency and a maximum velocity of 3.6 mm/s. For driving voltages of 55 V, the device had a maximum travel range of ±70 μm and exhibited an output force of 1.7 mN, resulting in the highest force and power densities reported so far for an electrostatic micromotor. After five days of operation, it had traveled a cumulative distance of more than 1.5 km in 34 billion steps without noticeable deterioration in performance." @default.
- W2114535268 created "2016-06-24" @default.
- W2114535268 creator A5006143543 @default.
- W2114535268 creator A5039709252 @default.
- W2114535268 creator A5053401940 @default.
- W2114535268 creator A5061605675 @default.
- W2114535268 creator A5073676276 @default.
- W2114535268 creator A5086832223 @default.
- W2114535268 date "2010-07-16" @default.
- W2114535268 modified "2023-09-30" @default.
- W2114535268 title "High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology" @default.
- W2114535268 cites W1963484607 @default.
- W2114535268 cites W1988814248 @default.
- W2114535268 cites W1989637938 @default.
- W2114535268 cites W2009811038 @default.
- W2114535268 cites W2018117798 @default.
- W2114535268 cites W2045038734 @default.
- W2114535268 cites W2052319034 @default.
- W2114535268 cites W2065003984 @default.
- W2114535268 cites W2086589073 @default.
- W2114535268 cites W2096488466 @default.
- W2114535268 cites W2098859405 @default.
- W2114535268 cites W2110092937 @default.
- W2114535268 cites W2125950824 @default.
- W2114535268 cites W2140638355 @default.
- W2114535268 cites W2142530162 @default.
- W2114535268 cites W2157035999 @default.
- W2114535268 cites W2166866476 @default.
- W2114535268 doi "https://doi.org/10.3390/mi1020048" @default.
- W2114535268 hasPublicationYear "2010" @default.
- W2114535268 type Work @default.
- W2114535268 sameAs 2114535268 @default.
- W2114535268 citedByCount "12" @default.
- W2114535268 countsByYear W21145352682012 @default.
- W2114535268 countsByYear W21145352682015 @default.
- W2114535268 countsByYear W21145352682016 @default.
- W2114535268 countsByYear W21145352682017 @default.
- W2114535268 countsByYear W21145352682021 @default.
- W2114535268 countsByYear W21145352682022 @default.
- W2114535268 countsByYear W21145352682023 @default.
- W2114535268 crossrefType "journal-article" @default.
- W2114535268 hasAuthorship W2114535268A5006143543 @default.
- W2114535268 hasAuthorship W2114535268A5039709252 @default.
- W2114535268 hasAuthorship W2114535268A5053401940 @default.
- W2114535268 hasAuthorship W2114535268A5061605675 @default.
- W2114535268 hasAuthorship W2114535268A5073676276 @default.
- W2114535268 hasAuthorship W2114535268A5086832223 @default.
- W2114535268 hasBestOaLocation W21145352681 @default.
- W2114535268 hasConcept C119599485 @default.
- W2114535268 hasConcept C127413603 @default.
- W2114535268 hasConcept C136525101 @default.
- W2114535268 hasConcept C142724271 @default.
- W2114535268 hasConcept C155310634 @default.
- W2114535268 hasConcept C155840801 @default.
- W2114535268 hasConcept C165801399 @default.
- W2114535268 hasConcept C171250308 @default.
- W2114535268 hasConcept C192562407 @default.
- W2114535268 hasConcept C204787440 @default.
- W2114535268 hasConcept C2779227376 @default.
- W2114535268 hasConcept C41008148 @default.
- W2114535268 hasConcept C71924100 @default.
- W2114535268 hasConceptScore W2114535268C119599485 @default.
- W2114535268 hasConceptScore W2114535268C127413603 @default.
- W2114535268 hasConceptScore W2114535268C136525101 @default.
- W2114535268 hasConceptScore W2114535268C142724271 @default.
- W2114535268 hasConceptScore W2114535268C155310634 @default.
- W2114535268 hasConceptScore W2114535268C155840801 @default.
- W2114535268 hasConceptScore W2114535268C165801399 @default.
- W2114535268 hasConceptScore W2114535268C171250308 @default.
- W2114535268 hasConceptScore W2114535268C192562407 @default.
- W2114535268 hasConceptScore W2114535268C204787440 @default.
- W2114535268 hasConceptScore W2114535268C2779227376 @default.
- W2114535268 hasConceptScore W2114535268C41008148 @default.
- W2114535268 hasConceptScore W2114535268C71924100 @default.
- W2114535268 hasIssue "2" @default.
- W2114535268 hasLocation W21145352681 @default.
- W2114535268 hasOpenAccess W2114535268 @default.
- W2114535268 hasPrimaryLocation W21145352681 @default.
- W2114535268 hasRelatedWork W1982708586 @default.
- W2114535268 hasRelatedWork W1992248698 @default.
- W2114535268 hasRelatedWork W2005859794 @default.
- W2114535268 hasRelatedWork W2119161493 @default.
- W2114535268 hasRelatedWork W2505733790 @default.
- W2114535268 hasRelatedWork W2612767608 @default.
- W2114535268 hasRelatedWork W2748952813 @default.
- W2114535268 hasRelatedWork W2899084033 @default.
- W2114535268 hasRelatedWork W3204749931 @default.
- W2114535268 hasRelatedWork W4292232851 @default.
- W2114535268 hasVolume "1" @default.
- W2114535268 isParatext "false" @default.
- W2114535268 isRetracted "false" @default.
- W2114535268 magId "2114535268" @default.
- W2114535268 workType "article" @default.