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- W2114597380 abstract "This paper reviews advances in nanotechnology and includes a discussion of microelectronics and microsystems. The main emphasis is on silicon technology, where the electrical properties are used in circuit applications and the mechanical properties are used in a growing range of sensor and micromechanical applications." @default.
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- W2114597380 title "The nanostructuring of materials for device and sensor applications" @default.
- W2114597380 doi "https://doi.org/10.1049/esej:19990607" @default.
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