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- W2114897899 abstract "Polytetrafluoroethylene (PTFE) has a low dielectric constant (1.9-2.1), high dielectric strength, good temperature resistance, and outstanding chemical inertness. It is being considered as a dielectric for both Al gap-fill and Cu damascene ULSI interconnect applications. A process has been developed which results in the ability to deposit an oxide cap layer that has good adhesion to the underlying PTFE dielectric. The process is defined, and annealing, CMP, stud pull test, XPS, and AFM results are presented." @default.
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- W2114897899 date "2002-11-27" @default.
- W2114897899 modified "2023-09-27" @default.
- W2114897899 title "An oxide cap process for a PTFE-based IC dielectric" @default.
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- W2114897899 doi "https://doi.org/10.1109/iitc.1998.704924" @default.
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