Matches in SemOpenAlex for { <https://semopenalex.org/work/W2115039657> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2115039657 abstract "Thin PZT film is being developed for use in microelectronics, electromechanical and optoelectronic applications. Thin Pb(ZrTi)O/sub 3/ film capacitor devices were fabricated using RF sputtering techniques. The multiple-layer configuration of Si/SiO/sub 2//Ti/Pt was used as the substrate and bottom electrode. The top electrode was Pt. At 1 kHz, the dissipation factor (tangent loss) of PZT film capacitors processed at 100/spl deg/C was 8.35%. However the dissipation factor of PZT film capacitor processed at 60/spl deg/C was only 0.35%. The dielectric constant was calculated to be 32 at 1 kHz. After annealing at 400/spl deg/C, the dielectric constant increased about 33% to 43. The dielectric constant increased to 165 after annealing at 500/spl deg/C and to 1143 after annealing at 600/spl deg/C. The PZT film capacitors produced to-date had little dependence on frequency from 20 Hz to 100 kHz. The frequency dependence increased with increasing annealing temperature from 400/spl deg/C to 600/spl deg/C. Lowering the processing temperature from 100/spl deg/C to 60/spl deg/C resulted in a tremendous decrease in the dissipation factor from 8.3% to 0.35%." @default.
- W2115039657 created "2016-06-24" @default.
- W2115039657 creator A5002950655 @default.
- W2115039657 creator A5022856802 @default.
- W2115039657 creator A5082304503 @default.
- W2115039657 date "2002-11-08" @default.
- W2115039657 modified "2023-09-26" @default.
- W2115039657 title "Low temperature processed lead zirconate titanate (PZT) film as dielectric for capacitor applications" @default.
- W2115039657 cites W1991553868 @default.
- W2115039657 cites W2031327577 @default.
- W2115039657 cites W2064335870 @default.
- W2115039657 doi "https://doi.org/10.1109/naecon.2000.894961" @default.
- W2115039657 hasPublicationYear "2002" @default.
- W2115039657 type Work @default.
- W2115039657 sameAs 2115039657 @default.
- W2115039657 citedByCount "0" @default.
- W2115039657 crossrefType "proceedings-article" @default.
- W2115039657 hasAuthorship W2115039657A5002950655 @default.
- W2115039657 hasAuthorship W2115039657A5022856802 @default.
- W2115039657 hasAuthorship W2115039657A5082304503 @default.
- W2115039657 hasConcept C119599485 @default.
- W2115039657 hasConcept C127413603 @default.
- W2115039657 hasConcept C133386390 @default.
- W2115039657 hasConcept C147789679 @default.
- W2115039657 hasConcept C159985019 @default.
- W2115039657 hasConcept C165801399 @default.
- W2115039657 hasConcept C168651791 @default.
- W2115039657 hasConcept C171250308 @default.
- W2115039657 hasConcept C17525397 @default.
- W2115039657 hasConcept C185592680 @default.
- W2115039657 hasConcept C187937830 @default.
- W2115039657 hasConcept C19067145 @default.
- W2115039657 hasConcept C192562407 @default.
- W2115039657 hasConcept C22423302 @default.
- W2115039657 hasConcept C2777855556 @default.
- W2115039657 hasConcept C2781128178 @default.
- W2115039657 hasConcept C49040817 @default.
- W2115039657 hasConcept C52192207 @default.
- W2115039657 hasConcept C544956773 @default.
- W2115039657 hasConcept C6432897 @default.
- W2115039657 hasConcept C79090758 @default.
- W2115039657 hasConcept C91066073 @default.
- W2115039657 hasConcept C97274863 @default.
- W2115039657 hasConceptScore W2115039657C119599485 @default.
- W2115039657 hasConceptScore W2115039657C127413603 @default.
- W2115039657 hasConceptScore W2115039657C133386390 @default.
- W2115039657 hasConceptScore W2115039657C147789679 @default.
- W2115039657 hasConceptScore W2115039657C159985019 @default.
- W2115039657 hasConceptScore W2115039657C165801399 @default.
- W2115039657 hasConceptScore W2115039657C168651791 @default.
- W2115039657 hasConceptScore W2115039657C171250308 @default.
- W2115039657 hasConceptScore W2115039657C17525397 @default.
- W2115039657 hasConceptScore W2115039657C185592680 @default.
- W2115039657 hasConceptScore W2115039657C187937830 @default.
- W2115039657 hasConceptScore W2115039657C19067145 @default.
- W2115039657 hasConceptScore W2115039657C192562407 @default.
- W2115039657 hasConceptScore W2115039657C22423302 @default.
- W2115039657 hasConceptScore W2115039657C2777855556 @default.
- W2115039657 hasConceptScore W2115039657C2781128178 @default.
- W2115039657 hasConceptScore W2115039657C49040817 @default.
- W2115039657 hasConceptScore W2115039657C52192207 @default.
- W2115039657 hasConceptScore W2115039657C544956773 @default.
- W2115039657 hasConceptScore W2115039657C6432897 @default.
- W2115039657 hasConceptScore W2115039657C79090758 @default.
- W2115039657 hasConceptScore W2115039657C91066073 @default.
- W2115039657 hasConceptScore W2115039657C97274863 @default.
- W2115039657 hasLocation W21150396571 @default.
- W2115039657 hasOpenAccess W2115039657 @default.
- W2115039657 hasPrimaryLocation W21150396571 @default.
- W2115039657 hasRelatedWork W2016158147 @default.
- W2115039657 hasRelatedWork W2040463682 @default.
- W2115039657 hasRelatedWork W2078593384 @default.
- W2115039657 hasRelatedWork W2092991010 @default.
- W2115039657 hasRelatedWork W2105484339 @default.
- W2115039657 hasRelatedWork W2118625916 @default.
- W2115039657 hasRelatedWork W2120268997 @default.
- W2115039657 hasRelatedWork W2156532734 @default.
- W2115039657 hasRelatedWork W2210361855 @default.
- W2115039657 hasRelatedWork W2315315476 @default.
- W2115039657 hasRelatedWork W2400387678 @default.
- W2115039657 hasRelatedWork W2901832252 @default.
- W2115039657 hasRelatedWork W2913028462 @default.
- W2115039657 hasRelatedWork W3119312426 @default.
- W2115039657 hasRelatedWork W835157514 @default.
- W2115039657 hasRelatedWork W2188729063 @default.
- W2115039657 hasRelatedWork W2832382211 @default.
- W2115039657 hasRelatedWork W2833633319 @default.
- W2115039657 hasRelatedWork W2844938904 @default.
- W2115039657 hasRelatedWork W2871483263 @default.
- W2115039657 isParatext "false" @default.
- W2115039657 isRetracted "false" @default.
- W2115039657 magId "2115039657" @default.
- W2115039657 workType "article" @default.