Matches in SemOpenAlex for { <https://semopenalex.org/work/W2115051073> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W2115051073 abstract "The ultra flexible lot-low management method was developed for Si wafer R&D lines. The system used comprises a scheduler and a flexible human machine interface. The scheduler is responsible for the many lots with fixed Standard process flows, while the Advanced lots with non-fixed flows are scheduled manually using the interface. This approach enhances both flexibility and efficiency of lot-flow scheduling in an R&D line consisting of the minimum amount of equipment." @default.
- W2115051073 created "2016-06-24" @default.
- W2115051073 creator A5026028141 @default.
- W2115051073 creator A5049679306 @default.
- W2115051073 date "2002-11-19" @default.
- W2115051073 modified "2023-09-25" @default.
- W2115051073 title "Ultra flexible R&D line management for Si wafer processes" @default.
- W2115051073 cites W2150428237 @default.
- W2115051073 doi "https://doi.org/10.1109/issm.1995.524348" @default.
- W2115051073 hasPublicationYear "2002" @default.
- W2115051073 type Work @default.
- W2115051073 sameAs 2115051073 @default.
- W2115051073 citedByCount "0" @default.
- W2115051073 crossrefType "proceedings-article" @default.
- W2115051073 hasAuthorship W2115051073A5026028141 @default.
- W2115051073 hasAuthorship W2115051073A5049679306 @default.
- W2115051073 hasConcept C105795698 @default.
- W2115051073 hasConcept C111919701 @default.
- W2115051073 hasConcept C113843644 @default.
- W2115051073 hasConcept C119599485 @default.
- W2115051073 hasConcept C127413603 @default.
- W2115051073 hasConcept C129307140 @default.
- W2115051073 hasConcept C149635348 @default.
- W2115051073 hasConcept C157915830 @default.
- W2115051073 hasConcept C160671074 @default.
- W2115051073 hasConcept C206729178 @default.
- W2115051073 hasConcept C21547014 @default.
- W2115051073 hasConcept C2780598303 @default.
- W2115051073 hasConcept C33923547 @default.
- W2115051073 hasConcept C41008148 @default.
- W2115051073 hasConcept C79403827 @default.
- W2115051073 hasConceptScore W2115051073C105795698 @default.
- W2115051073 hasConceptScore W2115051073C111919701 @default.
- W2115051073 hasConceptScore W2115051073C113843644 @default.
- W2115051073 hasConceptScore W2115051073C119599485 @default.
- W2115051073 hasConceptScore W2115051073C127413603 @default.
- W2115051073 hasConceptScore W2115051073C129307140 @default.
- W2115051073 hasConceptScore W2115051073C149635348 @default.
- W2115051073 hasConceptScore W2115051073C157915830 @default.
- W2115051073 hasConceptScore W2115051073C160671074 @default.
- W2115051073 hasConceptScore W2115051073C206729178 @default.
- W2115051073 hasConceptScore W2115051073C21547014 @default.
- W2115051073 hasConceptScore W2115051073C2780598303 @default.
- W2115051073 hasConceptScore W2115051073C33923547 @default.
- W2115051073 hasConceptScore W2115051073C41008148 @default.
- W2115051073 hasConceptScore W2115051073C79403827 @default.
- W2115051073 hasLocation W21150510731 @default.
- W2115051073 hasOpenAccess W2115051073 @default.
- W2115051073 hasPrimaryLocation W21150510731 @default.
- W2115051073 hasRelatedWork W1516155867 @default.
- W2115051073 hasRelatedWork W1523999050 @default.
- W2115051073 hasRelatedWork W1551032204 @default.
- W2115051073 hasRelatedWork W1830776359 @default.
- W2115051073 hasRelatedWork W1919690140 @default.
- W2115051073 hasRelatedWork W1948592969 @default.
- W2115051073 hasRelatedWork W1982162502 @default.
- W2115051073 hasRelatedWork W2104785258 @default.
- W2115051073 hasRelatedWork W2109845613 @default.
- W2115051073 hasRelatedWork W2158486846 @default.
- W2115051073 hasRelatedWork W2164617118 @default.
- W2115051073 hasRelatedWork W2172117203 @default.
- W2115051073 hasRelatedWork W2283241434 @default.
- W2115051073 hasRelatedWork W2535056981 @default.
- W2115051073 hasRelatedWork W2548413195 @default.
- W2115051073 hasRelatedWork W2752013619 @default.
- W2115051073 hasRelatedWork W3142338023 @default.
- W2115051073 hasRelatedWork W2102724598 @default.
- W2115051073 hasRelatedWork W2280131814 @default.
- W2115051073 hasRelatedWork W2928604741 @default.
- W2115051073 isParatext "false" @default.
- W2115051073 isRetracted "false" @default.
- W2115051073 magId "2115051073" @default.
- W2115051073 workType "article" @default.