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• W2115538287 abstract "Abstract Ion implantation experiments of C, N and O into stainless steel have been performed with beam-line and plasma source ion implantation methods. Acceleration voltages are varied between 27 and 50 kV, with pulsed ion current densities between 1 and 10 mA/cm 2 . Implanted doses range from 0.5 to 3×10 18 cm -2 , while workpiece temperatures are maintained between 25 and 800°C. The implant concentration profiles, microstructure and surface mechanical properties of the implanted materials are reported." @default.
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• W2115538287 date "1995-01-01" @default.
• W2115538287 modified "2023-10-16" @default.
• W2115538287 title "Carbon, Nitrogen, and Oxygen Ion Implantation of Stainless Steel" @default.
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• W2115538287 doi "https://doi.org/10.1557/proc-396-661" @default.
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