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• W2115679587 abstract "Micromachined thermal heater platforms offer low electrical power consumptionand high modulation speed, i.e. properties which are advantageous for realizing non-dispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report oninvestigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated byemploying different kinds of metallic and semiconductor heater materials. Our resultsclearly reveal the superior high-temperature performance of semiconductor over metallicheater materials. Long-term stable emitter operation in the vicinity of 1300 K could beattained using heavily antimony-doped tin dioxide (SnO2:Sb) heater elements." @default.
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• W2115679587 date "2006-04-07" @default.
• W2115679587 modified "2023-10-17" @default.
• W2115679587 title "High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials" @default.
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• W2115679587 doi "https://doi.org/10.3390/s6040405" @default.
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